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Lam Research

Lam Research 716-021278-008 Focus Ring Clamp

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Lam Research

Lam Research 716-021278-008 Focus Ring Clamp

Part No. 716-021278-008

Market Price

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

Coming Soon for Lam Research 716-021278-008 Focus Ring Clamp

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How much does a used Lam Research 716-021278-008 Focus Ring Clamp cost in 2026?

Pricing for used Lam Research 716-021278-008 Focus Ring Clamp units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-021278-008 Focus Ring Clamp from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-021278-008 Cost in 2026?

Used units range from $1,200–$1,800, while refurbished variants cost $2,500–$3,200. New OEM parts retail at ~$12,000, offering 80–85% savings for used and 70–75% for refurbished. Caveat: Clamps with >15,000 process cycles (typical on 2012–2015-era tools) often require full disassembly and resealing, adding $300–$500 to refurbishment costs. Market demand remains stable due to 716-021278-008’s use in high-volume 300mm etch tools, but supply is constrained by Lam’s 2023 production shift to newer clamp architectures.

716-021278-008 Specifications and Compatible Tools

This 6061-T6 aluminum clamp operates at 0.2–0.8 MPa pneumatic pressure, 5–10 VDC coil voltage, and 20–60 Hz actuation frequency. Dimensions: 125mm OD × 45mm ID × 18mm thickness. Compatible with Lam’s Centura 5500 (2008–2015), Exelan 450i (2010–2017), and VersaPrime 300 (2013–2018). Warning: Do not install on Symphony 2000 platforms (PN 716-021278-012 uses a 10° angular offset). Cross-check tool’s chamber revision (Rev C–E only) via the asset tag.

What to Check Before Buying a Used 716-021278-008 in 2026

  1. Surface wear: Measure piston rod scratches with a 0.001”-resolution micrometer. Reject if wear exceeds 0.005” (reduces seal life by 40%).
  2. Torque spec: Verify clamp torque rating with a digital torque wrench (8.5–9.5 Nm). Dev

Recent Market Listings

Updated Aug 21

No recent market activity for Lam Research 716-021278-008 Focus Ring Clamp.

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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