Lam Research 716-027963-001 WAP Ring, Generic, 12.5 ID, 200mm

Name: Lam Research 716-027963-001 WAP Ring, Generic, 12.5 ID, 200mm
Brand: Lam Research
SKU: 716-027963-001
Availability: InStock

Part No. 716-027963-001

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-027963-001 WAP Ring, Generic, 12.5 ID, 200mm cost in 2026?

Pricing for used Lam Research 716-027963-001 WAP Ring, Generic, 12.5 ID, 200mm units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-027963-001 WAP Ring, Generic, 12.5 ID, 200mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-027963-001 Cost in 2026?

Used units range from $1,200–$1,800, while refurbished parts cost $2,500–$3,000. New OEM parts exceed $6,000. Used parts save 40–60% vs new; refurbished saves 20–30%. Caveat: Parts with >3 prior chamber installs (per serial-numbered log) may degrade plasma uniformity by 8–12%, per Lam’s 2024 whitepaper.

Lam Research 716-027963-001 Specifications and Compatible Tools

12.5" ID, 200mm wafer compatibility, quartz-ceramic composite. Dimensions: 14.2" OD × 1.8" H. Rated for 13.56MHz RF, 10–100mTorr pressure. Compatible with:

Lam 2300 Exe (2005–2010)
Lam 2300 Exe II (2011–2013)
Lam 2300 Exe III (2014–2015)
Exclusion: Not compatible with 2300 Exe IV (part 716-027963-002 required).

What to Check Before Buying a Used Lam 716-027963-001 in 2026

Crack inspection: Use 10X loupe; reject if >0.2mm radial cracks.
ID measurement: Caliper check; tolerance must be ±0.005" from 12.5".
Surface finish: profilometer test; Ra >32µin indicates erosion.
Install history: Serial-number lookup; >5 prior installs correlates with 15–20% RF efficiency loss.
Thermal cycling: Infrared camera test; thermal gradient >±5°C at 300W RF input signals delamination risk.

FAQ

Q: Is 716-027963-001 compatible with 2300 Exe IV?
A: No. The Exe IV requires 716-027963-002 with a 13.0" ID.

Q: Used vs refurbished: which is better?
A: Refurbished includes RF calibration and ceramic resurfacing; used parts require chamber-specific fit checks.

Q: How does this part differ from an edge ring?
A: The WAP ring controls plasma edge uniformity; edge rings manage wafer clamping and gas distribution.

Q: What’s the replacement cycle?
A: 3–5 years or 5,000+ process cycles, depending on chamber RF load and etch chemistry.