Lam Research 716-028123-004 Ceramic Filler Ring

Name: Lam Research 716-028123-004 Ceramic Filler Ring
Brand: Lam Research
SKU: 716-028123-004
Availability: InStock

Part No. 716-028123-004

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-028123-004 Ceramic Filler Ring cost in 2026?

Pricing for used Lam Research 716-028123-004 Ceramic Filler Ring units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-028123-004 Ceramic Filler Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-028123-004 Cost in 2026?

Used units range from $1,200–$2,500 in 2026, depending on wafer start history and ceramic integrity. Refurbished variants (certified <5k wafer starts) cost $900–$1,800, saving 40–60% vs new OEM pricing (~$4,000–$5,000). Caveat: Parts from tools with >15k wafer starts may require recoating, adding $300–$600. Always request lifetime wafer start logs to avoid hidden costs.

716-028123-004 Specifications and Compatible Tools

Dimensions: 85.6mm OD × 52.4mm ID × 6.3mm thick
Material: 99% alumina ceramic, 1200°C max operating temp
Voltage Rating: 2kV DC isolation
Pressure Rating: 5 Torr min for plasma stability
Compatible with:
Lam Centura DSi eBeam (2012–2018)
Lam Centura HiStar (2010–2016)
Lam P5000 Versa (2014–2019)
Warning: Not compatible with Lam Centura Altis (part 716-028123-007). Using this part on Altis tools causes arcing.

What to Check Before Buying a Used 716-028123-004 in 2026

Crack inspection: Use 10X loupe; reject if >0.1mm surface cracks.
Thickness measurement: Micrometer check; min 4.2mm (±0.1mm tolerance).
Dielectric test: 15kV AC for 1 min using HiPot tester; >10GΩ resistance required.
Surface finish: Profilometer scan; Ra < 0.8µm (spec for plasma uniformity).
Wafer start history: Reject parts from tools with >12k starts without recoating.

FAQ

Q: Is 716-028123-004 used or refurbished better for high-volume etch tools?
A: Refurbished (certified <3k wafer starts) is optimal. Used parts may degrade faster above 8