Lam Research
Lam Research 716-030135-001 Edge Ring, 8 Inch
Lam Research
Lam Research 716-030135-001 Edge Ring, 8 Inch
Part No. 716-030135-001
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-08-10
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Lam Research 716-030135-001 Edge Ring, 8 Inch moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Lam Research 716-030135-001 Edge Ring, 8 Inch cost in 2026?
Pricing for used Lam Research 716-030135-001 Edge Ring, 8 Inch units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-030135-001 Edge Ring, 8 Inch from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
716-030135-001 Specifications and Compatible Tools
This 8-inch edge ring operates at 13.56 MHz RF, 10–50 mTorr pressure, and 200–400 W RF power. Constructed from aluminum alloy 6061-T6 with a ceramic-coated edge (0.5mm thickness). Compatible with Lam’s Centura DSiE (models 8200/8900, 2003–2012) and Producer HDP (models 8200/8900, 2001–2009). Exclusion: Not compatible with 716-030135-002 (12-inch variant) or tools using silicon carbide chucks. Verify tool’s RF matching network specs to avoid impedance mismatches.
What to Check Before Buying a Used 716-030135-001 in 2026
- Surface erosion: Use a digital caliper to measure ceramic coating thickness. Reject if <0.3mm remains.
- Warpage: Place on a surface plate and check with a dial gauge. >0.05mm deviation invalidates part.
- Cycle count: Cross-reference tool logs or Lam’s PartLife™ database. Avoid parts >7,500 cycles.
- Plasma scorching: Inspect via UV light for micro-cracks; use a profilometer to confirm Ra <1.6 µm.
- OEM rework history: Refurbished parts must include a rework certificate with date (post-2020 preferred) and coating spec compliance.
FAQ
Q: Is 716-030135-001 used in 8-inch or 12-inch tools?
A: Exclusively 8-inch. The 716-030135-
Recent Market Listings
Updated Sep 30No recent market activity for Lam Research 716-030135-001 Edge Ring, 8 Inch.
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