Lam Research 716-031535-002 ESC Bottom Clamp Ring

Name: Lam Research 716-031535-002 ESC Bottom Clamp Ring
Brand: Lam Research
SKU: 716-031535-002
Availability: InStock

Part No. 716-031535-002

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Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-031535-002 ESC Bottom Clamp Ring cost in 2026?

Pricing for used Lam Research 716-031535-002 ESC Bottom Clamp Ring units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Electrostatic Chucks vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-031535-002 ESC Bottom Clamp Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-031535-002 Cost in 2026?

Used units for 716-031535-002 will trade between $1,200–$1,800 in 2026, depending on revision level and surface finish. Refurbished variants, with full dielectric testing and ceramic re-coating, range from $2,500–$3,000. These prices represent 40–60% savings over new OEM pricing (which exceeds $4,500). Note: Parts with revision codes older than Rev 002 may lack compatibility with 2020+ tool upgrades, reducing their effective lifespan by 15–20%. Always confirm the part’s revision against your tool’s maintenance manual before purchase.

716-031535-002 Specifications and Compatible Tools

This ESC bottom clamp ring measures 150mm OD × 100mm ID × 20mm H, constructed from ceramic composite for thermal stability up to 300°C. It operates at 5kV dielectric rating and supports vacuum levels below 1e-5 Torr. Compatible tools include Lam’s Plasmalab System 100 (2012–2018 production) and Centura Etch XP (2015–2020). Exclusion: Do not install on Symphony platforms using part 716-031535-005, as the 0.2mm ID mismatch causes chuck misalignment. Cross-reference your tool’s serial number with Lam’s compatibility matrix (Rev D, 2021) to avoid fitment errors.

What to Check Before Buying a Used 716-031535-002 in 2026

Surface cracks: Use a 10X loupe to inspect for hairline fractures; reject parts with cracks >0.1mm depth (per Lam ST-0087 inspection protocol).
Dimensional tolerance: Measure OD with a 0.001”-resolution micrometer; deviation beyond ±0.05mm invalidates vacuum seal integrity.
Ceramic coating wear: Profile with a Taylor Hobson PGI 1060 to confirm Ra < 0.8µm; Ra > 1.2µm indicates premature erosion.
Dielectric test: Apply 4kV AC for 1 minute using a Megger MIT545; leakage >10µA fails safety standards.
Revision history: Verify the part was not produced between 2014–2016 (Rev 001A), which had a