Lam Research
Lam Research 716-031535-002 ESC Bottom Clamp Ring
Lam Research
Lam Research 716-031535-002 ESC Bottom Clamp Ring
Part No. 716-031535-002
Market Price
→ Stable$1K
One observed secondary-market listing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-08-10
Talk to a specialist · parts@caladansemi.com
Market price (observed)
$1,100
5 listings · last checked Sep 11, 2026 · asking prices, not sold
Source: ebay
How much does a used Lam Research 716-031535-002 ESC Bottom Clamp Ring cost in 2026?
One observed secondary-market listing for a used Lam Research 716-031535-002 ESC Bottom Clamp Ring from Lam Research: $1k (2026). A single observation is not a market range. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Electrostatic Chucks vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-031535-002 ESC Bottom Clamp Ring from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
716-031535-002 Specifications and Compatible Tools
This ESC bottom clamp ring measures 150mm OD × 100mm ID × 20mm H, constructed from ceramic composite for thermal stability up to 300°C. It operates at 5kV dielectric rating and supports vacuum levels below 1e-5 Torr. Compatible tools include Lam’s Plasmalab System 100 (2012–2018 production) and Centura Etch XP (2015–2020). Exclusion: Do not install on Symphony platforms using part 716-031535-005, as the 0.2mm ID mismatch causes chuck misalignment. Cross-reference your tool’s serial number with Lam’s compatibility matrix (Rev D, 2021) to avoid fitment errors.
What to Check Before Buying a Used 716-031535-002 in 2026
- Surface cracks: Use a 10X loupe to inspect for hairline fractures; reject parts with cracks >0.1mm depth (per Lam ST-0087 inspection protocol).
- Dimensional tolerance: Measure OD with a 0.001”-resolution micrometer; deviation beyond ±0.05mm invalidates vacuum seal integrity.
- Ceramic coating wear: Profile with a Taylor Hobson PGI 1060 to confirm Ra < 0.8µm; Ra > 1.2µm indicates premature erosion.
- Dielectric test: Apply 4kV AC for 1 minute using a Megger MIT545; leakage >10µA fails safety standards.
- Revision history: Verify the part was not produced between 2014–2016 (Rev 001A), which had a
Recent Market Listings
Updated Sep 30No recent market activity for Lam Research 716-031535-002 ESC Bottom Clamp Ring.
Submit a bid to get notified when sellers list this part.
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Quick Info
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Market: $1K (one observed listing)
Response within 4 hours. Export compliance handled.
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