Lam Research
Lam Research 716-041983-001 Ceramic Chamber Liner
Lam Research
Lam Research 716-041983-001 Ceramic Chamber Liner
Part No. 716-041983-001
Market Price
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Request Quote →Last verified: 2026-08-10
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Market Data
Coming Soon for Lam Research 716-041983-001 Ceramic Chamber Liner
Price history and market activity data is being compiled.
How much does a used Lam Research 716-041983-001 Ceramic Chamber Liner cost in 2026?
Pricing for used Lam Research 716-041983-001 Ceramic Chamber Liner units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-041983-001 Ceramic Chamber Liner from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 716-041983-001 Cost in 2026?
Used units range from $8,500 to $12,000 in 2026, depending on service history and ceramic integrity. Refurbished variants (with OEM-certified recoating) cost $10,500 to $15,000. These prices save 45–55% vs new (list price ~$24,500). Caveat: Liners with >5 years of thermal cycling (typical in 2018–2021 production runs) often show microcracks, reducing usable lifespan by 30–50%. Always request a recent plasma exposure log to assess degradation.
Lam Research 716-041983-001 Specifications and Compatible Tools
This Al₂O₃-based ceramic liner operates at max 350°C and withstands 13.56 MHz RF fields. Dimensions: 580mm OD × 420mm ID × 15mm wall thickness. Compatible with Lam TCP 9600 PTX models produced 2010–2017 (serial prefixes L9P-12 through L9P-17). Exclusion: Not compatible with TCP 9600X systems upgraded to 716-041983-002 (2019+ models). Verify chamber RF coupling specs to avoid arcing risks.
What to Check Before Buying a Used 716-041983-001 in 2026
- Ceramic integrity: Use a 10X loupe to inspect for cracks >50µm or pitting clusters. Reject if >3% surface area is degraded.
- Thickness measurement: Confirm wall thickness ≥12.5mm via ultrasonic gauge. <12mm indicates excessive erosion.
- Dielectric test: Apply 10kV AC for 1 minute using a megohmmeter. Fail if leakage exceeds 10µA.
- Service history: Demand a log of last 3 replacements. Liners with <1,500 process hours since last coat are optimal.
- Thermal shock cycles: Ask for documented cycles (max spec: 250°C to 350°C, 500+ cycles). >700 cycles correlates with 40% higher failure risk.
FAQ
Q: Is used 716-041983-001 or refurbished better for a Lam TCP 9600?
A: Refurbished
Recent Market Listings
Updated Aug 21No recent market activity for Lam Research 716-041983-001 Ceramic Chamber Liner.
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