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Lam Research

Lam Research 716-041983-001 Ceramic Chamber Liner

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Lam Research

Lam Research 716-041983-001 Ceramic Chamber Liner

Part No. 716-041983-001

Market Price

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 716-041983-001 Ceramic Chamber Liner cost in 2026?

Pricing for used Lam Research 716-041983-001 Ceramic Chamber Liner units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-041983-001 Ceramic Chamber Liner from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-041983-001 Cost in 2026?

Used units range from $8,500 to $12,000 in 2026, depending on service history and ceramic integrity. Refurbished variants (with OEM-certified recoating) cost $10,500 to $15,000. These prices save 45–55% vs new (list price ~$24,500). Caveat: Liners with >5 years of thermal cycling (typical in 2018–2021 production runs) often show microcracks, reducing usable lifespan by 30–50%. Always request a recent plasma exposure log to assess degradation.

Lam Research 716-041983-001 Specifications and Compatible Tools

This Al₂O₃-based ceramic liner operates at max 350°C and withstands 13.56 MHz RF fields. Dimensions: 580mm OD × 420mm ID × 15mm wall thickness. Compatible with Lam TCP 9600 PTX models produced 2010–2017 (serial prefixes L9P-12 through L9P-17). Exclusion: Not compatible with TCP 9600X systems upgraded to 716-041983-002 (2019+ models). Verify chamber RF coupling specs to avoid arcing risks.

What to Check Before Buying a Used 716-041983-001 in 2026

  1. Ceramic integrity: Use a 10X loupe to inspect for cracks >50µm or pitting clusters. Reject if >3% surface area is degraded.
  2. Thickness measurement: Confirm wall thickness ≥12.5mm via ultrasonic gauge. <12mm indicates excessive erosion.
  3. Dielectric test: Apply 10kV AC for 1 minute using a megohmmeter. Fail if leakage exceeds 10µA.
  4. Service history: Demand a log of last 3 replacements. Liners with <1,500 process hours since last coat are optimal.
  5. Thermal shock cycles: Ask for documented cycles (max spec: 250°C to 350°C, 500+ cycles). >700 cycles correlates with 40% higher failure risk.

FAQ

Q: Is used 716-041983-001 or refurbished better for a Lam TCP 9600?
A: Refurbished

Recent Market Listings

Updated Aug 21

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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