Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm

Name: Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm
Brand: Lam Research
SKU: 716-058766-802
Availability: InStock

Part No. 716-058766-802

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Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm cost in 2026?

Pricing for used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-058766-802 Cost in 2026?

Used units typically range from $12,500 to $18,000, while refurbished variants add 15–20% to that baseline. New OEM parts exceed $35,000, making used purchases save 55–60% directly. Critical caveat: Y2O3 coating thickness must retain ≥0.3mm (per Lam spec 716-COAT-003) to avoid plasma instability. Parts with <0.25mm coating often fail within 500 cycles due to uneven erosion.

Lam Research 716-058766-802 Specifications and Compatible Tools

This 300mm yttria-coated bottom edge ring operates at 13.56MHz RF, 15–30mTorr pressure, and 200–400W RF power. Compatible with Lam Centura DSiE (models 8200/8220, 2005–2012) and Producer platforms (models 8300/8320, 2008–2015). Exclusion: Do not install on 716-058766-803-equipped chambers (2013+ models) due to RF coupling mismatch. Verify chamber serial number prefix “LAM-C82” for compatibility.

What to Check Before Buying a Used Lam Research 716-058766-802 in 2026

Coating integrity: Use a Keyence VK-X200 microscope to scan for cracks >50µm or delamination >10% surface area.
Plasma hours: Reject parts with >6,000 cumulative cycles (logbook entry required).
Dimensional tolerance: Measure ID/OD with a Mitutoyo 500-196-30 caliper; deviations >±0.1mm void compatibility.
RF continuity: Test with a Fluke 1587 insulation meter; resistance <10^12Ω indicates coating failure.
Thermal history: Inquire about peak chamber temps >450°C (reduces Y2O3 lifespan by 30%).

FAQ

Q: Does 716-058766-802 fit Lam’s Symphony etch tools?
A: No. Symphony series uses 716-058766-805 (2016+ design).

Q: Used vs. new: which lasts longer?
A: New parts have 10,000-cycle warranties; high-quality used parts with <2,500 cycles match 60–70% of new lifespan.

Q: How to verify coating thickness without disassembly?
A: Use a Fischer XDL-2 XRF gun (calibrated for Y2O3) at 3+ points; average must ≥0.32mm.

Q: Can I reuse 716-058766-802 from a decommissioned Centura on a Producer?
A: Yes, if Producer model is pre-2010 (check serial number prefix “P-8300A”). Post-2010 models require 716-058766-804.