Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm

Name: Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm
Brand: Lam Research
SKU: 716-058766-802

Part No. 716-058766-802

Market Price

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Available by Request

Last verified: 2026-08-10

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm cost in 2026?

Pricing for used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-058766-802 Edge Ring, Bottom, Y2O3, 300mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 716-058766-802 Specifications and Compatible Tools

This 300mm yttria-coated bottom edge ring operates at 13.56MHz RF, 15–30mTorr pressure, and 200–400W RF power. Compatible with Lam Centura DSiE (models 8200/8220, 2005–2012) and Producer platforms (models 8300/8320, 2008–2015). Exclusion: Do not install on 716-058766-803-equipped chambers (2013+ models) due to RF coupling mismatch. Verify chamber serial number prefix “LAM-C82” for compatibility.

What to Check Before Buying a Used Lam Research 716-058766-802 in 2026

Coating integrity: Use a Keyence VK-X200 microscope to scan for cracks >50µm or delamination >10% surface area.
Plasma hours: Reject parts with >6,000 cumulative cycles (logbook entry required).
Dimensional tolerance: Measure ID/OD with a Mitutoyo 500-196-30 caliper; deviations >±0.1mm void compatibility.
RF continuity: Test with a Fluke 1587 insulation meter; resistance <10^12Ω indicates coating failure.
Thermal history: Inquire about peak chamber temps >450°C (reduces Y2O3 lifespan by 30%).

FAQ

Q: Does 716-058766-802 fit Lam’s Symphony etch tools?
A: No. Symphony series uses 716-058766-805 (2016+ design).

Q: Used vs. new: which lasts longer?
A: New parts have 10,000-cycle warranties; high-quality used parts with <2,500 cycles match 60–70% of new lifespan.

Q: How to verify coating thickness without disassembly?
A: Use a Fischer XDL-2 XRF gun (calibrated for Y2O3) at 3+ points; average must ≥0.32mm.

Q: Can I reuse 716-058766-802 from a decommissioned Centura on a Producer?
A: Yes, if Producer model is pre-2010 (check serial number prefix “P-8300A”). Post-2010 models require 716-058766-804.