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Lam Research

Lam Research 716-058766-807 Edge Ring, Top, Y, EBP, 301mm

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Lam Research

Lam Research 716-058766-807 Edge Ring, Top, Y, EBP, 301mm

Part No. 716-058766-807

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 716-058766-807 Edge Ring, Top, Y, EBP, 301mm cost in 2026?

Pricing for used Lam Research 716-058766-807 Edge Ring, Top, Y, EBP, 301mm units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-058766-807 Edge Ring, Top, Y, EBP, 301mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-058766-807 Cost in 2026?

Used units for the 716-058766-807 Edge Ring (301mm) trade between $1,200–$1,800 in 2026, while refurbished variants command $2,500–$3,000. These prices represent 40–60% savings versus new OEM pricing (typically $5,000–$6,500). Caveat: Parts with >500 process cycles in high-density plasma environments show >30% higher failure rates during leak testing. Always verify cycle history via the tool’s process log or the seller’s maintenance records. Refurbished units include ceramic resurfacing and vacuum seal replacement; confirm if plasma-facing surfaces retain original contour specifications.

716-058766-807 Specifications and Compatible Tools

This edge ring operates at 1.5–3.0 mTorr pressure, 13.56 MHz RF frequency, and 200–400°C process temperatures. Dimensions: 301mm OD × 15.2mm height, with a 0.002” radial tolerance. Compatible tools include Lam Research Plasmalab Series 700 (2012–2015), 800 (2014–2017), and 900 (2016–2018) etch platforms. Exclusion: Do not install on Plasmalab 820 systems using part number 716-058766-808—incorrect geometry causes plasma instability. Verify tool model and edge ring port alignment before purchase. Ceramic composite construction requires matching thermal expansion coefficients (CTE 5.2–5.5 ppm/°C) for long-term vacuum integrity.

What to Check Before Buying a Used 716-058766-807 in 2026

  1. Surface cracks/microfractures: Use a 10X loupe and UV light; reject parts with cracks >0.1mm in plasma-facing zones.
  2. Thickness measurement: Confirm minimum 2.8mm wall thickness via digital micrometer at three axial points; <2.5mm indicates excessive erosion.
  3. Surface finish: Profile plasma-exposed surfaces with a 3D stylus profilometer; Ra >0.2µm roughness correlates with deposition defects.
  4. Cycle count: Cross-reference with tool logs; parts exceeding 500 cycles in Cl2/O2 chemistries show 40% higher delamination risk.
  5. Leak test: Perform helium mass spectrometry at 1×10⁻⁶ mbar·l/s; failures indicate sealant degradation. Avoid units >8 years old without full refurbishment.

FAQ

Q: Is 716-058766-807 compatible with Lam’s Symphony etch tools?
A: No. Symphony platforms use part number 716-058766-812 with a 3

Recent Market Listings

Updated Aug 21

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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