Lam Research 716-140068-001 6 Inch Focus Ring for ESC

Name: Lam Research 716-140068-001 6 Inch Focus Ring for ESC
Brand: Lam Research
SKU: 716-140068-001
Availability: InStock

Part No. 716-140068-001

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-140068-001 6 Inch Focus Ring for ESC cost in 2026?

Pricing for used Lam Research 716-140068-001 6 Inch Focus Ring for ESC units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-140068-001 6 Inch Focus Ring for ESC from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-140068-001 Cost in 2026?

Used units for the 716-140068-001 6-inch focus ring range from $1,200 to $1,800, while refurbished variants cost $2,500 to $3,500 in 2026. New OEM parts exceed $6,000, offering 40–60% savings with used/refurbished options. Caveat: Parts from tools decommissioned before 2018 may show >15% ceramic erosion, reducing effective lifespan by 30–50%. Always request plasma exposure history from sellers.

716-140068-001 Specifications and Compatible Tools

This focus ring operates at 13.56 MHz RF frequency, with a 6.0 ± 0.1 mm outer diameter and 2.54 mm thickness. It withstands -100 kPa to 100 kPa pressure and -50°C to 300°C temperature. Compatible with Lam Research Centura® platforms (1998–2005), Exelan® 300 (2001–2007), and Prodigy® 5500 (2003–2010). Exclusion: Not compatible with 716-140069-002 ESC variants due to mismatched RF coupling geometry. Verify tool’s ESC model number before purchase.

What to Check Before Buying a Used 716-140068-001 in 2026

Ceramic integrity: Use a 10X loupe to inspect for microcracks; reject parts with >3 surface flaws per 10 cm².
Dimensional tolerance: Measure outer diameter with a digital caliper; deviation >0.05 mm invalidates plasma uniformity.
Plasma exposure history: Request logs; parts with >10,000 cumulative hours in high-density plasma risk dielectric degradation.
Flatness test: Place on a granite surface plate; maximum warp must be ≤0.1 mm across the 6-inch face.
ESC interface wear: Check contact surfaces for erosion >0.2 mm using a micrometer; excessive wear causes edge uniformity loss.

FAQ

Q: Is 716-140068-001 compatible with 8-inch wafer tools?
A: No. This part is strictly for 6-inch wafers. 8-inch systems require 716-140068-002.

**Q: Used vs refurbished