Lam Research
Lam Research 716-140068-001 6 Inch Focus Ring for ESC
Lam Research
Lam Research 716-140068-001 6 Inch Focus Ring for ESC
Part No. 716-140068-001
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-08-10
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Market price (estimated)
$1,100 to $2,500
3 listings · last checked Sep 11, 2026 · asking prices, not sold
Estimated from a small sample (3 listings); treat as indicative.
Source: ebay
How much does a used Lam Research 716-140068-001 6 Inch Focus Ring for ESC cost in 2026?
Pricing for used Lam Research 716-140068-001 6 Inch Focus Ring for ESC units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-140068-001 6 Inch Focus Ring for ESC from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
716-140068-001 Specifications and Compatible Tools
This focus ring operates at 13.56 MHz RF frequency, with a 6.0 ± 0.1 mm outer diameter and 2.54 mm thickness. It withstands -100 kPa to 100 kPa pressure and -50°C to 300°C temperature. Compatible with Lam Research Centura® platforms (1998–2005), Exelan® 300 (2001–2007), and Prodigy® 5500 (2003–2010). Exclusion: Not compatible with 716-140069-002 ESC variants due to mismatched RF coupling geometry. Verify tool’s ESC model number before purchase.
What to Check Before Buying a Used 716-140068-001 in 2026
- Ceramic integrity: Use a 10X loupe to inspect for microcracks; reject parts with >3 surface flaws per 10 cm².
- Dimensional tolerance: Measure outer diameter with a digital caliper; deviation >0.05 mm invalidates plasma uniformity.
- Plasma exposure history: Request logs; parts with >10,000 cumulative hours in high-density plasma risk dielectric degradation.
- Flatness test: Place on a granite surface plate; maximum warp must be ≤0.1 mm across the 6-inch face.
- ESC interface wear: Check contact surfaces for erosion >0.2 mm using a micrometer; excessive wear causes edge uniformity loss.
FAQ
Q: Is 716-140068-001 compatible with 8-inch wafer tools?
A: No. This part is strictly for 6-inch wafers. 8-inch systems require 716-140068-002.
Recent Market Listings
Updated Sep 30No recent market activity for Lam Research 716-140068-001 6 Inch Focus Ring for ESC.
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