✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Lam Research

Lam Research 716-140163-001 6-Inch Hot Edge Ring

No photo

Lam Research

Lam Research 716-140163-001 6-Inch Hot Edge Ring

Part No. 716-140163-001

Market Price

→ Stable

$750–$3K

Typical secondary market pricing · USD

Low $750Avg $1,875High $3,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $750 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 716-140163-001 6-Inch Hot Edge Ring

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 716-140163-001 6-Inch Hot Edge Ring cost in 2026?

A used Lam Research 716-140163-001 6-Inch Hot Edge Ring from Lam Research typically sells for $750 – $3k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-140163-001 6-Inch Hot Edge Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

The 716-140163-001 is a 6-inch hot edge ring used in Lam Research etch chamber process kits. Edge rings sit around the wafer on the electrostatic chuck and help shape the plasma boundary at the wafer edge. This part is used across Lam etch platforms that process 6-inch wafers.

Observed Market Pricing

Observed asking prices for 716-140163-001 range from $750 to $3,000 across 2 listings we track.

Condition	Observed price	Source	Observed
New	$750	ebay	Sep 2026
New	$3,000	ebay	Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 716-140163-001: new. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect the ring surface for plasma erosion, cracking, and chipping before installation, as edge rings are consumables with wear limits that directly affect etch uniformity at the wafer edge.

Frequently Asked Questions

Q: How much does Lam Research 716-140163-001 cost? A: Observed market asking prices run $750 to $3,000 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Q: Which tools does 716-140163-001 fit? A: The specific tool compatibility for this part is not stated in the listing. Confirm fitment by cross-referencing part number 716-140163-001 against your tool's BOM — we verify fit before quoting.

Q: What condition options are available for 716-140163-001? A: We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 716-140163-001? A: Use the quote form on this page — the part number 716-140163-001 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30

AskSep 23, 2026

$638

As-is

AskSep 16, 2026

$1,425

Used

AskSep 9, 2026

$2,325

Refurbished

Type	Price	Condition	Date
Ask	$638	As-is	Sep 23, 2026
Ask	$1,425	Used	Sep 16, 2026
Ask	$2,325	Refurbished	Sep 9, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 716-140163-001 cost?

Observed market asking prices run $750 to $3,000 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Which tools does 716-140163-001 fit?

The specific tool compatibility for this part is not stated in the listing. Confirm fitment by cross-referencing part number 716-140163-001 against your tool's BOM — we verify fit before quoting.

What condition options are available for 716-140163-001?

We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 716-140163-001?

Use the quote form on this page — the part number 716-140163-001 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.