Lam Research 716-140163-001 6-Inch Hot Edge Ring

Name: Lam Research 716-140163-001 6-Inch Hot Edge Ring
Brand: Lam Research
SKU: 716-140163-001
Availability: InStock

Part No. 716-140163-001

Market Price

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-140163-001 6-Inch Hot Edge Ring cost in 2026?

Pricing for used Lam Research 716-140163-001 6-Inch Hot Edge Ring units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-140163-001 6-Inch Hot Edge Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-140163-001 Cost in 2026?

Used units for the 716-140163-001 6-Inch Hot Edge Ring range between $1,200–$2,500 in 2026, depending on cycle count and surface integrity. Refurbished variants (with verified <200 process cycles) start at $1,500–$3,000. New OEM pricing exceeds $6,500, offering 40–60% savings with used/refurbished options. Caveat: Parts with >500 thermal cycles show >30% higher failure rates in plasma uniformity tests. Always request cycle logs and surface inspection reports before purchase.

716-140163-001 Specifications and Compatible Tools

This hot edge ring operates at 800°C max, with a 6.0" OD × 0.5" thickness and quartz-ceramic composite construction. Key specs: 1.2 MPa pressure rating, 0.1–10 MHz RF compatibility. Compatible with:

Lam Centura DSi (1998–2003)
Lam ProDx Etch (2001–2006)
Lam Exelan 300 (2004–2008)
Exclusion: Not compatible with 716-140163-002 due to differing mounting interface geometry. Verify tool model and part revision before installation.

What to Check Before Buying a Used 716-140163-001 in 2026

Crack inspection: Use a 10× magnifier; reject parts with >0.1 mm radial cracks.
Thickness measurement: Confirm OD within 5.98–6.02" using a digital caliper; >0.02" variance risks plasma instability.
Surface finish: Test with a profilometer; Ra >0.2 µm indicates excessive erosion.
**Thermal shock history