Lam Research 716-460215-002 6-Inch Focus Ring

Name: Lam Research 716-460215-002 6-Inch Focus Ring
Brand: Lam Research
SKU: 716-460215-002
Availability: InStock

Part No. 716-460215-002

Market Price

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 716-460215-002 6-Inch Focus Ring cost in 2026?

Pricing for used Lam Research 716-460215-002 6-Inch Focus Ring units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-460215-002 6-Inch Focus Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-460215-002 Cost in 2026?

Used units for the 716-460215-002 6-Inch Focus Ring range between $1,200–$1,800 in 2026, while refurbished variants command $1,500–$2,200, depending on chamber-specific wear. New OEM parts from Lam Research exceed $4,500, offering ~65–70% savings with used/refurbished options. Critical caveat: parts with >500 plasma cycles or surface erosion >50 µm (measured via profilometry) risk plasma instability and should be rejected. Market demand for 6-inch focus rings remains stable due to legacy tool prevalence, but pricing varies by chamber configuration—verify compatibility before purchase.

716-460215-002 Specifications and Compatible Tools

This focus ring operates at RF frequencies up to 13.56 MHz and withstands 2,000W RF power without arcing. Dimensions: 6.0-inch outer diameter × 0.5-inch thickness, constructed from quartz-based ceramic for plasma uniformity. Compatible with Lam Research Centura Series 8200 (2003–2012), Producer 5500 (2001–2008), and Endura Etch platforms (2005–2010). Exclusion: Do not install on 716-460215-001-equipped chambers—mismatched geometry causes RF coupling failure. Cross-check part numbers via Lam’s TechSpec 3.2.1 database to confirm chamber alignment.

What to Check Before Buying a Used 716-460215-002 in 2026

Surface cracks: Use a 10× loupe to inspect for microfractures >10 µm deep—reject if present.
Thickness tolerance: Measure with a digital micrometer; deviation >0.05 inches from 0.500” spec invalidates performance.
RF uniformity test: Validate with a vector network analyzer (VNA) at 13.56 MHz; S11 reflection >-15 dB indicates degradation.
Erosion profile: Scan with a 3D profilometer—uneven wear >20 µm across the surface correlates with plasma sheath distortion.
Cycle count: Request service logs; parts beyond 800 cycles (typical lifecycle) require derating.