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Lam Research

Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber

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Lam Research

Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber

Part No. 716-460216-002

Market Price

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Available by Request

Last verified: 2026-08-10

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber cost in 2026?

Pricing for used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-460216-002 Cost in 2026?

Used units range from $1,200–$1,800 depending on process history, while refurbished variants hit $2,500–$3,000. New parts from Lam Research retail at $6,500–$7,500, making used options 45–70% cheaper and refurbished parts 60–70% cheaper. Caveat: Parts with >10% edge erosion or exposure to high-corrosion processes (e.g., chlorine-based etches) drop value by 20–30%. Always verify cycle count—units with >8,000 process runs require derating.

Lam Research 716-460216-002 Specifications and Compatible Tools

This 8-inch focus ring operates at 3.5–4.5 kV, 13.56 MHz, and 200–400°C. Key specs: outer diameter 228.6 mm, thickness 12.7 mm, material SiC-coated quartz. Compatible with Lam Centura DSiE (2012–2018), ProDx Etch (2015–2020), and Prodigy DPS (2017–2022) systems. Exclude use in Lam 716-460216-003 variants—incorrect geometry causes plasma instability. Cross-check chamber ID codes (STP-8A, STP-8B) for fit.

What to Check Before Buying a Used Lam Research 716-460216-002 in 2026

  1. Crack inspection: Use 10× loupe; reject parts with >0.2 mm radial cracks.
  2. Dimensional tolerance: Measure OD/ID with digital caliper; deviation >±0.05 mm invalidates uniformity.
  3. Surface finish: Profile with stylus profilometer; Ra >0.2 μm indicates erosion.
  4. Process history: Request log of etch chemistries—avoid parts with >500 cycles in CF₄/O₂ plasmas.
  5. Edge wear: Compare to OEM wear template; erosion beyond 10% nominal thickness reduces lifespan by 40%.

FAQ

Q: Does 716-460216-002 fit Lam Centura platforms made before 2010?
A: No. Pre-2010 Centura STP chambers use 716-460216-001 (7.5-inch ring).

Q: Used vs refurbished—what’s the difference for this part?
A: Used parts are cleaned and tested; refurbished units include SiC recoating and plasma stress testing.

Q: How to test a used 716-460216-002 for edge erosion?
A: Use a 0–25 mm digital caliper and

Recent Market Listings

Updated Aug 21

No recent market activity for Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber.

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Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts
Lead Time2-4 weeks after sourcing

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