Lam Research
Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber
Lam Research
Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber
Part No. 716-460216-002
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-08-10
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Market Data
Coming Soon for Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber
Price history and market activity data is being compiled.
How much does a used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber cost in 2026?
Pricing for used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam Research 716-460216-002 Cost in 2026?
Used units range from $1,200–$1,800 depending on process history, while refurbished variants hit $2,500–$3,000. New parts from Lam Research retail at $6,500–$7,500, making used options 45–70% cheaper and refurbished parts 60–70% cheaper. Caveat: Parts with >10% edge erosion or exposure to high-corrosion processes (e.g., chlorine-based etches) drop value by 20–30%. Always verify cycle count—units with >8,000 process runs require derating.
Lam Research 716-460216-002 Specifications and Compatible Tools
This 8-inch focus ring operates at 3.5–4.5 kV, 13.56 MHz, and 200–400°C. Key specs: outer diameter 228.6 mm, thickness 12.7 mm, material SiC-coated quartz. Compatible with Lam Centura DSiE (2012–2018), ProDx Etch (2015–2020), and Prodigy DPS (2017–2022) systems. Exclude use in Lam 716-460216-003 variants—incorrect geometry causes plasma instability. Cross-check chamber ID codes (STP-8A, STP-8B) for fit.
What to Check Before Buying a Used Lam Research 716-460216-002 in 2026
- Crack inspection: Use 10× loupe; reject parts with >0.2 mm radial cracks.
- Dimensional tolerance: Measure OD/ID with digital caliper; deviation >±0.05 mm invalidates uniformity.
- Surface finish: Profile with stylus profilometer; Ra >0.2 μm indicates erosion.
- Process history: Request log of etch chemistries—avoid parts with >500 cycles in CF₄/O₂ plasmas.
- Edge wear: Compare to OEM wear template; erosion beyond 10% nominal thickness reduces lifespan by 40%.
FAQ
Q: Does 716-460216-002 fit Lam Centura platforms made before 2010?
A: No. Pre-2010 Centura STP chambers use 716-460216-001 (7.5-inch ring).
Q: Used vs refurbished—what’s the difference for this part?
A: Used parts are cleaned and tested; refurbished units include SiC recoating and plasma stress testing.
Q: How to test a used 716-460216-002 for edge erosion?
A: Use a 0–25 mm digital caliper and
Recent Market Listings
Updated Aug 21No recent market activity for Lam Research 716-460216-002 Focus Ring, 8-Inch, STP Chamber.
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