Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm

Name: Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm
Brand: Lam Research
SKU: 716-803156-004
Availability: InStock

Part No. 716-803156-004

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-08-10

Place a Bid or Ask

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm cost in 2026?

Pricing for used Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 716-803156-004 Focus Ring Assembly – CVP DFC 300mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 716-803156-004 Cost in 2026?

Used units range from $12,000–$18,000 in 2026, depending on cycle count and surface wear. Refurbished variants (with ceramic recoating and flow-path calibration) cost $8,500–$14,000. This represents 40–60% savings versus new OEM pricing ($20,000–$30,000). Caveat: Parts with >15,000 process cycles (typical lifespan) show 20–30% higher defect rates in edge plasma uniformity tests. Always request cycle logs and plasma test reports.

Lam Research 716-803156-004 Specifications and Compatible Tools

This focus ring assembly operates at 13.56 MHz RF, 10–500 mTorr pressure, and 200–400°C chamber temps. Dimensions: 304.8mm OD × 45.7mm H, 12.7mm wall thickness. Compatible with:

Lam P5000 DFC (2012–2018)
Lam Centura DFC (2005–2014)
Lam Endura DFC (2008–2016)
Exclusion: Not compatible with Lam P6000 DFC (part 716-803156-005) due to revised mounting flange (M8 vs M6 threaded ports). Verify chamber serial numbers before purchase.

What to Check Before Buying a Used Lam 716-803156-004 in 2026

Surface Cracks: Use a 10X loupe; reject parts with >3 cracks >0.2mm in the ceramic edge ring.
Dimensional Wear: Measure ID/OD with a 0.001”-resolution caliper; tolerance must be ±0.05mm from spec.
Gas Leak Test: Perform a helium mass spectrometer leak test; <1×10⁻⁷ atm·cc/sec is acceptable.
Cycle Count: Reject parts with >15,000 cycles (per Lam’s 2023 lifecycle whitepaper).
**Coating Integrity