Lam Research 718-092326-066 6 Inch Electrostatic Chuck

Name: Lam Research 718-092326-066 6 Inch Electrostatic Chuck
Brand: Lam Research
SKU: 718-092326-066
Availability: InStock

Part No. 718-092326-066

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Last verified: 2026-08-10

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research 718-092326-066 6 Inch Electrostatic Chuck cost in 2026?

Pricing for used Lam Research 718-092326-066 6 Inch Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Lam Research Electrostatic Chucks vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 718-092326-066 6 Inch Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research 718-092326-066 Cost in 2026?

Used units range from $12,000–$15,000, while refurbished models cost $18,000–$20,000. New OEM parts exceed $45,000, offering 60–65% savings with used options. Refurbished variants include recalibrated voltage regulators and replaced dielectric layers. Critical caveat: dielectric layer thickness must exceed 0.8mm (per Lam spec 718-092326-TS3). Below 0.7mm, arcing risk increases by 40% during high-power etch cycles.

Lam Research 718-092326-066 Specifications and Compatible Tools

Rated for 5kV DC voltage, 2.5A max current, and 200–400°C operating range. Constructed with aluminum base and ceramic-coated dielectric. Compatible with Lam Plasmalab Series 700 (models 718-0923xx, 2005–2012) and Centura platforms (models 718-092xx-0xx, 1998–2003). Exclusion: Symphony platform (part 718-092326-099) uses 8kV-rated chucks; using this part risks insulation failure. Verify tool’s voltage spec before installation.

What to Check Before Buying a Used Lam Research 718-092326-066 in 2026

Dielectric integrity: Measure thickness with a digital micrometer (min 0.8mm).
Voltage leakage: Apply 4kV DC via high-voltage power supply; leakage >10µA invalidates part.
Surface cracks: Inspect under UV light for microfractures (reject if >3 cracks in 10cm²).
Thermal history: Request maintenance logs; >15,000 thermal cycles correlates with 30% higher failure rate.
Vacuum seal: Test with helium mass spectrometer; >1×10⁻⁶ mbar·L/s leakage is nonconforming.

FAQ

Q: Is 718-092326-066 compatible with 300mm wafer tools?
A: No. This 6-inch chuck is designed for 150mm wafers. 300mm tools require part 718-092326-150.

Q: Used vs refurbished: which is better?
A: Refurbished includes dielectric replacement and voltage recalibration. Used parts may require rework if dielectric thickness <0.8mm.

Q: How long does this chuck last?
A: 8,000–12,000 process cycles, depending on thermal stress and plasma intensity.

Q: Can I test voltage leakage myself?
A: Requires a high-voltage power supply (e