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Lam Research

Lam Research 853-001983-011 Spare Part Assembly

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Lam Research

Lam Research 853-001983-011 Spare Part Assembly

Part No. 853-001983-011

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Available by Request

Last verified: 2026-08-10

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 853-001983-011 Spare Part Assembly moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Lam Research 853-001983-011 Spare Part Assembly cost in 2026?

Pricing for used Lam Research 853-001983-011 Spare Part Assembly units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Other Spares vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 853-001983-011 Spare Part Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 853-001983-011 Specifications and Compatible Tools

This assembly operates at 24V DC, 2.1A with a frequency tolerance of 45–65 Hz. It supports vacuum pressures up to 1.5 × 10⁻⁴ Torr and thermal cycling between -20°C to 125°C. Compatible tools include:

  • Lam Endura 8200 (2015–2017 production)
  • Lam Centura 5500 (2016–2018 models)
  • Lam Flex 7000 (2014–2016 revisions).
    Warning: Not compatible with Lam 853-001983-012 (2019+ models) due to a revised PCB layout. Cross-check BOM revision codes before installation.

What to Check Before Buying a Used 853-001983-011 in 2026

  1. Visual inspection: Reject parts with cracked housing or corroded connectors (use a 10x loupe for micro-cracks).
  2. Electrical continuity: Test with a multimeter; resistance must read 0.8–1.2 Ω between terminals.
  3. Cycle count: Verify via tool logs; parts with >5,000 cycles require derating by 20–25%.
  4. Vacuum integrity: Use a 5kV insulation tester; leakage >0.5 mA invalidates the unit.
  5. Firmware compatibility: Confirm BOM revision matches your tool’s 2026 software update (v3.7.2+).

FAQ

Q: What does the 853-001983-011 assembly do?
A: It’s a vacuum actuator assembly used in Lam’s deposition tools for chamber door sealing.

Q: Used vs new: which is better for high-volume production?
A: New parts are required for

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Updated Sep 30

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Quick Info

ConditionUsed
CategoryOther Spares

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