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Lam Research

Lam Research 853-031685-001 Upper Match Assembly

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Lam Research

Lam Research 853-031685-001 Upper Match Assembly

Part No. 853-031685-001

Market Price

→ Stable

$5K–$8K

Typical secondary market pricing · USD

Low $4,500Avg $6,000High $7,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $5K – $8K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 853-031685-001 Upper Match Assembly

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 853-031685-001 Upper Match Assembly cost in 2026?

A used Lam Research 853-031685-001 Upper Match Assembly from Lam Research typically sells for $5k – $8k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research RF Match & Power vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 853-031685-001 Upper Match Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

The 853-031685-001 is an upper RF match assembly manufactured by Lam Research, used to tune and transfer RF power efficiently to the plasma chamber. It works as part of the impedance matching network, sitting between the RF generator and the electrode to minimize reflected power. This part is used across Lam etch platforms and carries related reference numbers 853-031684-001, 715-31666-001, and 123665.

Observed Market Pricing

Observed asking prices for 853-031685-001 range from $4,500 to $7,500 across 3 listings we track.

Condition	Observed price	Source	Observed
New	$4,500	surplusglobal	Apr 2026
Seller refurbished	$5,000	ebay	Sep 2026
For parts or not working	$7,500	ebay	Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 853-031685-001: for parts or not working, new, seller refurbished. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

RF match assemblies contain capacitors, motors, and internal tuning components that can degrade over time — confirm the unit has been tested and verify tuning range and motor function before installation.

Frequently Asked Questions

Q: How much does Lam Research 853-031685-001 cost? A: Observed market asking prices run $4,500 to $7,500 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Q: Which tools does 853-031685-001 fit? A: The specific tool compatibility is not identified in the available description. Confirm fitment by cross-referencing P/N 853-031685-001 against your tool's BOM — we verify compatibility before quoting.

Q: What condition options are available for 853-031685-001? A: We've seen this P/N offered as: for parts or not working, new, seller refurbished. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 853-031685-001? A: Use the quote form on this page — the part number 853-031685-001 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30

AskSep 23, 2026

$3,825

As-is

AskSep 16, 2026

$5,400

Used

AskSep 9, 2026

$6,600

Refurbished

Type	Price	Condition	Date
Ask	$3,825	As-is	Sep 23, 2026
Ask	$5,400	Used	Sep 16, 2026
Ask	$6,600	Refurbished	Sep 9, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 853-031685-001 cost?

Observed market asking prices run $4,500 to $7,500 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Which tools does 853-031685-001 fit?

The specific tool compatibility is not identified in the available description. Confirm fitment by cross-referencing P/N 853-031685-001 against your tool's BOM — we verify compatibility before quoting.

What condition options are available for 853-031685-001?

We've seen this P/N offered as: for parts or not working, new, seller refurbished. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 853-031685-001?

Use the quote form on this page — the part number 853-031685-001 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.