✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Lam Research

Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher

No photo

Lam Research

Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher

Part No. 853-080615-003

Market Price

→ Stable

From $15K

Typical secondary market pricing · USD

Low $14,500Avg $14,500High $14,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-30

Request Quote · $15K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher cost in 2026?

A used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher from Lam Research typically sells for $15k – $15k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

The 853-080615-003 is a USC (ultra-sonic cleaner or upper station chuck, per Lam nomenclature) assembly configured for 200mm wafer processing on Lam etcher platforms. It is a 384T-designated unit, indicating a specific torque or tooling configuration within the etch system. This assembly is used in Lam etcher applications as indicated in the listing description.

Observed Market Pricing

We have 1 observed listing for 853-080615-003 at $14,500.

| Condition | Observed price | Source | Observed | |---|---|---|---| | New | $14,500 | surplusglobal | Apr 2026 |

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 853-080615-003: new. Availability in a specific condition changes week to week.

Typical lead time is 2-4 weeks after sourcing confirmation; parts already on a partner's shelf ship sooner. Every unit is inspected before shipment.

For USC assemblies, inspect electrical connections and mechanical interfaces for wear or damage before installation. Confirm the 384T configuration matches your specific chamber build, as variants within a part family can differ in fitment.

Frequently Asked Questions

Q: How much does Lam Research 853-080615-003 cost? A: We've observed 853-080615-003 listed at $14,500. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Q: Which tools does 853-080615-003 fit? A: The description references Lam etcher platforms at the 200mm, 384T specification. Compatibility beyond that should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.

Q: What condition options are available for 853-080615-003? A: We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 853-080615-003? A: Use the quote form on this page — the part number 853-080615-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 9

AskSep 2, 2026

$12,325

As-is

AskAug 26, 2026

$14,500

Used

AskAug 19, 2026

$14,500

Refurbished

Type	Price	Condition	Date
Ask	$12,325	As-is	Sep 2, 2026
Ask	$14,500	Used	Aug 26, 2026
Ask	$14,500	Refurbished	Aug 19, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 853-080615-003 cost?

We've observed 853-080615-003 listed at $14,500. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Which tools does 853-080615-003 fit?

The description references Lam etcher platforms at the 200mm, 384T specification. Compatibility beyond that should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.

What condition options are available for 853-080615-003?

We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 853-080615-003?

Use the quote form on this page — the part number 853-080615-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.