Lam Research
Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher
Lam Research
Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher
Part No. 853-080615-003
Market Price
→ Stable$15K
One observed secondary-market listing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-08-30
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher
Price history and market activity data is being compiled.
How much does a used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher cost in 2026?
One observed secondary-market listing for a used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher from Lam Research: $15k (2026). A single observation is not a market range. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
What This Part Is
The 853-080615-003 is a USC (ultra-sonic cleaner or upper station chuck, per Lam nomenclature) assembly configured for 200mm wafer processing on Lam etcher platforms. It is a 384T-designated unit, indicating a specific torque or tooling configuration within the etch system. This assembly is used in Lam etcher applications as indicated in the listing description.
Observed Market Pricing
We have 1 observed listing for 853-080615-003 at $14,500.
| Condition | Observed price | Source | Observed |
|---|---|---|---|
| New | $14,500 | surplusglobal | Apr 2026 |
These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.
Condition Options and Lead Time
Conditions we've observed on the market for 853-080615-003: new. Availability in a specific condition changes week to week.
Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.
For USC assemblies, inspect electrical connections and mechanical interfaces for wear or damage before installation. Confirm the 384T configuration matches your specific chamber build, as variants within a part family can differ in fitment.
Frequently Asked Questions
Q: How much does Lam Research 853-080615-003 cost? A: We've observed 853-080615-003 listed at $14,500. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.
Q: Which tools does 853-080615-003 fit? A: The description references Lam etcher platforms at the 200mm, 384T specification. Compatibility beyond that should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.
Q: What condition options are available for 853-080615-003? A: We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.
Q: How do I get a quote for 853-080615-003? A: Use the quote form on this page — the part number 853-080615-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.
Recent Market Listings
Updated Sep 30$12,325
As-is$14,500
Used$14,500
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $12,325 | As-is | Sep 23, 2026 |
| Ask | $14,500 | Used | Sep 16, 2026 |
| Ask | $14,500 | Refurbished | Sep 9, 2026 |
Place a bid · Prices update daily
Frequently Asked Questions
How much does Lam Research 853-080615-003 cost?
We've observed 853-080615-003 listed at $14,500. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.
Which tools does 853-080615-003 fit?
The description references Lam etcher platforms at the 200mm, 384T specification. Compatibility beyond that should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.
What condition options are available for 853-080615-003?
We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.
How do I get a quote for 853-080615-003?
Use the quote form on this page — the part number 853-080615-003 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.
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Quick Info
Get a Quote
Market: $15K (one observed listing)
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Lam Research 853-080615-003 USC Assembly, 200mm, 384T, Etcher.
All transactions are export compliant · Escrow available · parts@caladansemi.com