✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Lam Research

Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2

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Lam Research

Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2

Part No. 853-143791-912

Market Price

→ Stable

$699–$7K

Typical secondary market pricing · USD

Low $699Avg $3,849High $6,999

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $699 – $7K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2 cost in 2026?

A used Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2 from Lam Research typically sells for $699 – $7k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Sensors & Instrumentation vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 853-143791-912 Spectrometer Assembly with Excelitas PAX-1005-3LAM2 from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

This is a spectrometer assembly, part number 853-143791-912 Rev B, produced by Lam Research and paired with an Excelitas PAX-1005-3LAM2 optical sensor module. Spectrometers like this are used for optical emission spectroscopy (OES) to monitor plasma process conditions and detect endpoint during etch operations. The unit is used across Lam etch platforms as a process monitoring and control component.

Observed Market Pricing

Observed asking prices for 853-143791-912 range from $699 to $6,999 across 3 listings we track.

Condition	Observed price	Source	Observed
pre-owned	$699	eBay	2026-07-16
Used	$5,999	ebay	Sep 2026
Used	$6,999	ebay	Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 853-143791-912: used, pre-owned. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect the optical window and fiber coupling for contamination, scratches, or fogging, as these degrade signal quality. Verify the detector module is functional and that firmware or interface revision matches your system's controller requirements.

Frequently Asked Questions

Q: How much does Lam Research 853-143791-912 cost? A: Observed market asking prices run $699 to $6,999 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Q: Which tools does 853-143791-912 fit? A: The specific tool compatibility for this part is not identified in the listing. Confirm fit by cross-referencing the part number 853-143791-912 against your tool's BOM — we verify compatibility before quoting.

Q: What condition options are available for 853-143791-912? A: We've seen this P/N offered as: used, pre-owned. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 853-143791-912? A: Use the quote form on this page — the part number 853-143791-912 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30

AskSep 23, 2026

$594

As-is

AskSep 16, 2026

$2,589

Used

AskSep 9, 2026

$5,109

Refurbished

Type	Price	Condition	Date
Ask	$594	As-is	Sep 23, 2026
Ask	$2,589	Used	Sep 16, 2026
Ask	$5,109	Refurbished	Sep 9, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Lam Research 853-143791-912 cost?

Observed market asking prices run $699 to $6,999 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Which tools does 853-143791-912 fit?

The specific tool compatibility for this part is not identified in the listing. Confirm fit by cross-referencing the part number 853-143791-912 against your tool's BOM — we verify compatibility before quoting.

What condition options are available for 853-143791-912?

We've seen this P/N offered as: used, pre-owned. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 853-143791-912?

Use the quote form on this page — the part number 853-143791-912 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.