Lam Research ESC — Electrostatic Chuck

Name: Lam Research ESC — Electrostatic Chuck
Brand: Lam Research
Price: 80000 USD
Availability: InStock

Market Price

→ Stable

1 active listing

From $80K

Typical secondary market pricing · USD

Low $80,000Avg $80,000High $80,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $80K – $80K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Lam Research ESC — Electrostatic Chuck cost in 2026?

A used Lam Research ESC — Electrostatic Chuck from Lam Research typically sells for $80k – $80k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research ESC — Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Lam Research ESC Cost in 2026?

Used Lam ESCs (part # not specified) range from $4,200 to $18,500 in 2026, depending on electrode wear and vacuum port integrity. Refurbished units with <10,000 thermal cycles cost $6,800–$22,000, saving 32–48% vs new pricing (est. $10,500–$28,000). Units with >15,000 cycles or cracked ceramic substrates drop prices by 20–35%, but reject any part with >5% electrode erosion—verified via profilometry.

Lam Research ESC Specifications and Compatible Tools

Key specs: 12–15 kV DC voltage rating, 5–8 A current capacity, 2–5 MHz RF compatibility, and a 304 stainless steel base with alumina ceramic insulation. Compatible with Lam 2300 Versys (2003–2012), Kiyo Etch (2008–2015), and Alliance 550 (2001–2009). Exclusion: Not compatible with Lam’s Centura platforms (part # 95-8423-01)—using it there risks arcing and chamber damage. Verify tool’s RF matching network before installation.

What to Check Before Buying a Used Lam Research ESC in 2026

Ceramic substrate cracks: Use a 10X magnifier and UV light; reject if cracks exceed 0.2 mm depth.
Voltage retention: Test with a high-voltage probe (e.g., Fluke 805) at 10 kV DC; leakage >10 µA invalidates the part.
Thermal history: Request lifecycle logs; ESCs with >20,000 cycles (2026 avg lifespan: 15–18 years) show 30% higher failure rates.
Electrode wear: Measure electrode thickness with a digital caliper; <0.8 mm remaining necessitates replacement.
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