Lam Research ESC — Electrostatic Chuck

Name: Lam Research ESC — Electrostatic Chuck
Brand: Lam Research

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research ESC — Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research ESC — Electrostatic Chuck cost in 2026?

Pricing for used Lam Research ESC — Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research ESC — Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research ESC Specifications and Compatible Tools

Key specs: 12–15 kV DC voltage rating, 5–8 A current capacity, 2–5 MHz RF compatibility, and a 304 stainless steel base with alumina ceramic insulation. Compatible with Lam 2300 Versys (2003–2012), Kiyo Etch (2008–2015), and Alliance 550 (2001–2009). Exclusion: Not compatible with Lam’s Centura platforms (part # 95-8423-01)—using it there risks arcing and chamber damage. Verify tool’s RF matching network before installation.

What to Check Before Buying a Used Lam Research ESC in 2026

Ceramic substrate cracks: Use a 10X magnifier and UV light; reject if cracks exceed 0.2 mm depth.
Voltage retention: Test with a high-voltage probe (e.g., Fluke 805) at 10 kV DC; leakage >10 µA invalidates the part.
Thermal history: Request lifecycle logs; ESCs with >20,000 cycles (2026 avg lifespan: 15–18 years) show 30% higher failure rates.
Electrode wear: Measure electrode thickness with a digital caliper; <0.8 mm remaining necessitates replacement.
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