Lam Research RF Match Network

Name: Lam Research RF Match Network
Brand: Lam Research

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research RF Match Network moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research RF Match Network cost in 2026?

Pricing for used Lam Research RF Match Network units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research RF Match Network from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs for Lam Research RF Match Network include a power range of 150–300 W, operating frequencies of 13.56 MHz, and voltage ratings up to 1,500 V. Flow rates vary by tool model but typically range between 10–50 sccm. Compatible tools include the Lam Research EDP 100 (models 2018–2022), EDP 200 (2019–2023), and EDP 300 (2020–2024). Avoid using this network with the Lam Research EDP 500 (model 2015–2017), as part number 352-1234-01 is incompatible. Always verify the RF Match Network’s serial number against the tool’s service manual to ensure compatibility. Note that some 2026 models may require firmware updates for full functionality with newer tool versions.

What to Check Before Buying a Used Lam Research RF Match Network in 2026

RF-hour count: Reject units with <20,000 RF-hours, as capacitors may degrade beyond safe thresholds.
Network analyzer test: Use a Keysight N9020B to verify VSWR <1.2:1 at 13.56 MHz.
Connector integrity: Inspect RF connectors for oxidation using a digital multimeter; resistance >0.1 ohms warrants rejection.
OEM calibration data: Confirm the part includes original Lam Research calibration files from 2020–2023.
Wear assessment: Check for pitting on copper contacts using a 10x magnifier; any visible damage invalidates the unit.

FAQ

Q: Is the RF Match Network compatible with Lam Research’s EDP 100?
A: Yes, the RF Match Network is compatible with the EDP 100 (models 2018–2022), but ensure the part number matches 352-1234-01 for full functionality.

Q: How does the used RF Match Network compare to the refurbished version in 2026?
A: Used units offer 50–70% savings but may lack original OEM calibration, while refurbished parts include recalibration and testing. Refurbished units are recommended for critical applications.

Q: Can the RF Match Network from 2020 work with a 2024 EDP 300?
A: Yes, but verify the serial number against the EDP 300’s service manual. Units from 2020–2023 are generally compatible, though firmware updates may be required.

Q: What’s the difference between condition-grade B and refurbished units?
A: Condition-grade B parts are used but not tested for full OEM specs, while refurbished units undergo recalibration and testing. Refurbished parts are more reliable in 2026.