005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron)

Name: 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron)
Brand: Tokyo Electron
SKU: 005-50908-1

Part No. 005-50908-1

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) cost in 2026?

Pricing for used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

005-50908-1 Specifications and Compatible Tools

Rated for 5kV DC voltage, 1.5kW power, and 13.56 MHz RF coupling. Gas flow rate: 5–50 sccm argon. Compatible with TEL Trias SPA (2009–2015 vintage) and TEL Trias (pre-2012 models). Do not install on systems using part number 005-50908-2, which has a different RF coupling design. Verify tool’s vacuum interface (ISO 286-2 standard) and electrode gap (0.3–0.5mm). Units produced post-2014 include improved ceramic coatings for reduced particle generation.

What to Check Before Buying a Used 005-50908-1 in 2026

RF-hour count: Reject units >40,000 hours; coil degradation accelerates beyond this threshold.
Voltage test: Use a high-voltage multimeter to confirm 5kV ±5% output under load.
Dielectric integrity: Perform a Megohmmeter test (5kV DC) to ensure insulation resistance >10GΩ.
Surface inspection: Ceramic cracks >0.2mm or pitting >5µm depth disqualify the chuck.
Manufacturing date: Units made pre-2018 may have suboptimal ceramic adhesion (check serial number prefix).
Leak test: Use helium mass spectrometer to confirm <1×10⁻⁹ mbar·L/s vacuum leakage.

Q: Is used 005-50908-1 better than refurbished?
A: Used units save 50–70% vs new but may need minor repairs. Refurbished includes mandatory coil and coating replacements, ensuring 12–18 months of runtime.

Q: Will 005-50908-1 fit a 2013 Trias SPA?
A: Yes. Confirm your tool’s vacuum flange is ISO 286-2 and electrode gap is 0.3–0.5mm.

Q: Is 005-50908-1 compatible with 005-50908-2 systems?
A: No. The 005-50908-2 has a different RF coupling design; mixing parts causes arcing and tool downtime.

Q: What’s the 2026 lead time for sourced units?
A: 2–4 weeks after sourcing, pending RF-hour verification and shipping logistics.