005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron)

Name: 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron)
Brand: Tokyo Electron
SKU: 005-50908-1
Availability: InStock

Part No. 005-50908-1

Market Price

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Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) cost in 2026?

Pricing for used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 005-50908-1 Cost in 2026?

Used prices for 005-50908-1 in 2026 range from $12,000 to $18,000, depending on RF-hour count and surface wear. Refurbished units with coil replacement and dielectric testing start at $22,000–$26,000. New OEM list price exceeds $65,000, making used units 50–70% cheaper. Units with >40,000 RF-hours often require coil replacement ($3,500–$5,000) and may void savings. Market stability in 2026 reflects steady demand from Trias SPA tool upgrades. Always verify RF-hour logs and ceramic wear before purchase. Price variations arise from vacuum port corrosion and electrode alignment tolerances.

005-50908-1 Specifications and Compatible Tools

Rated for 5kV DC voltage, 1.5kW power, and 13.56 MHz RF coupling. Gas flow rate: 5–50 sccm argon. Compatible with TEL Trias SPA (2009–2015 vintage) and TEL Trias (pre-2012 models). Do not install on systems using part number 005-50908-2, which has a different RF coupling design. Verify tool’s vacuum interface (ISO 286-2 standard) and electrode gap (0.3–0.5mm). Units produced post-2014 include improved ceramic coatings for reduced particle generation.

What to Check Before Buying a Used 005-50908-1 in 2026

RF-hour count: Reject units >40,000 hours; coil degradation accelerates beyond this threshold.
Voltage test: Use a high-voltage multimeter to confirm 5kV ±5% output under load.
Dielectric integrity: Perform a Megohmmeter test (5kV DC) to ensure insulation resistance >10GΩ.
Surface inspection: Ceramic cracks >0.2mm or pitting >5µm depth disqualify the chuck.
Manufacturing date: Units made pre-2018 may have suboptimal ceramic adhesion (check serial number prefix).
Leak test: Use helium mass spectrometer to confirm <1×10⁻⁹ mbar·L/s vacuum leakage.

Q: Is used 005-50908-1 better than refurbished?
A: Used units save 50–70% vs new but may need minor repairs. Refurbished includes mandatory coil and coating replacements, ensuring 12–18 months of runtime.

Q: Will 005-50908-1 fit a 2013 Trias SPA?
A: Yes. Confirm your tool’s vacuum flange is ISO 286-2 and electrode gap is 0.3–0.5mm.

Q: Is 005-50908-1 compatible with 005-50908-2 systems?
A: No. The 005-50908-2 has a different RF coupling design; mixing parts causes arcing and tool downtime.

Q: What’s the 2026 lead time for sourced units?
A: 2–4 weeks after sourcing, pending RF-hour verification and shipping logistics.