3D90-000001-V1 — Process Module Showerhead (Tokyo Electron)

Name: 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron)
Brand: Tokyo Electron
SKU: 3D90-000001-V1
Availability: InStock

Part No. 3D90-000001-V1

Market Price

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Available by Request

Last verified: 2026-05-11

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Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) cost in 2026?

Pricing for used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 3D90-000001-V1 Cost in 2026?

Used 3D90-000001-V1 showerheads typically range from $18,000 to $24,000 in 2026, while refurbished units average $22,000–$28,000. These prices represent 35–45% savings compared to new OEM pricing (which exceeds $40,000).

Caveat: Units with ceramic nozzle degradation (visible cracks or pitting) may cost 10–15% less but require immediate reconditioning. Always verify the part’s last maintenance date—components over 8 years old often incur hidden repair costs.

3D90-000001-V1 Specifications and Compatible Tools

Gas flow rate: 50–200 sccm (adjustable via TEL’s FC-4000 flow controller)
Max pressure rating: 5 psi
Voltage: 24V DC (RF bias compatible)
Material: Aluminum base with silicon carbide nozzles

Compatible tools:

TEL Alpha 8SE (models A8SE-2015, A8SE-2017)
TEL Alpha 8SE+ (2016–2019 production)

Exclusion warning: Do not install on TEL Centura platforms (part number 3D90-000002-V1 required). The 3D90-000001-V1’s nozzle array is incompatible with Centura’s gas distribution manifold.

What to Check Before Buying a Used 3D90-000001-V1 in 2026

Ceramic nozzle integrity: Inspect for cracks or erosion using a 10x magnifier. Reject parts with >3 damaged nozzles.
Gas flow uniformity: Test with a mass flow controller (MFC-5000); deviation >±8% indicates clogging.
Electrical continuity: Use a multimeter to verify 24V DC resistance <0.5Ω.
Installation history: Confirm the part was last used in a PECVD system (not etch). Etch systems degrade nozzles 2x faster.
Lifecycle age: Avoid units older than 2018 (10+ years of thermal cycling increases failure risk).

FAQ

Q: Is 3D90-000001-V1 compatible with TEL’s 2020 Alpha 8SE+?
A: No. The 2020+ Alpha 8SE+ requires 3D90-000001-V2 due to revised gas port spacing.

Q: Used vs. refurbished—what’s the difference?
A: Used parts are resold as-is; refurbished units undergo TEL’s full rework (nozzle replacement, flow calibration). Refurbished parts carry a 12-month warranty.

Q: How long does a 3D90-000001-V1 last?
A: 5–7 years in PECVD systems with quarterly cleaning. Etch applications reduce lifespan to 3–4 years.

**Q: Can I retrofit