3D90-000001-V1 — Process Module Showerhead (Tokyo Electron)

Name: 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron)
Brand: Tokyo Electron
SKU: 3D90-000001-V1

Part No. 3D90-000001-V1

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) cost in 2026?

Pricing for used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 3D90-000001-V1 — Process Module Showerhead (Tokyo Electron) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

3D90-000001-V1 Specifications and Compatible Tools

Gas flow rate: 50–200 sccm (adjustable via TEL’s FC-4000 flow controller)
Max pressure rating: 5 psi
Voltage: 24V DC (RF bias compatible)
Material: Aluminum base with silicon carbide nozzles

Compatible tools:

TEL Alpha 8SE (models A8SE-2015, A8SE-2017)
TEL Alpha 8SE+ (2016–2019 production)

Exclusion warning: Do not install on TEL Centura platforms (part number 3D90-000002-V1 required). The 3D90-000001-V1’s nozzle array is incompatible with Centura’s gas distribution manifold.

What to Check Before Buying a Used 3D90-000001-V1 in 2026

Ceramic nozzle integrity: Inspect for cracks or erosion using a 10x magnifier. Reject parts with >3 damaged nozzles.
Gas flow uniformity: Test with a mass flow controller (MFC-5000); deviation >±8% indicates clogging.
Electrical continuity: Use a multimeter to verify 24V DC resistance <0.5Ω.
Installation history: Confirm the part was last used in a PECVD system (not etch). Etch systems degrade nozzles 2x faster.
Lifecycle age: Avoid units older than 2018 (10+ years of thermal cycling increases failure risk).

FAQ

Q: Is 3D90-000001-V1 compatible with TEL’s 2020 Alpha 8SE+?
A: No. The 2020+ Alpha 8SE+ requires 3D90-000001-V2 due to revised gas port spacing.

Q: Used vs. refurbished—what’s the difference?
A: Used parts are resold as-is; refurbished units undergo TEL’s full rework (nozzle replacement, flow calibration). Refurbished parts carry a 12-month warranty.

Q: How long does a 3D90-000001-V1 last?
A: 5–7 years in PECVD systems with quarterly cleaning. Etch applications reduce lifespan to 3–4 years.