Tokyo Electron
TEL Bake Plate / Hot Plate Assembly
Tokyo Electron
TEL Bake Plate / Hot Plate Assembly
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for TEL Bake Plate / Hot Plate Assembly moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used TEL Bake Plate / Hot Plate Assembly cost in 2026?
Pricing for used TEL Bake Plate / Hot Plate Assembly units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Tokyo Electron Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used TEL Bake Plate / Hot Plate Assembly from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
TEL Bake Plate / Hot Plate Assembly Specifications and Compatible Tools
Key specs: 150°C–450°C operating range, 2.5kW power draw, 304 stainless steel construction with ceramic insulation, ±2°C uniformity (per TEL-S-HP-003 rev. B). Compatible with:
- TEL FAS-2000 (2005–2010 production)
- TEL P-5000 PECVD (2008–2015)
- TEL Centura® Thermal (2012–2018)
Exclusion: Not compatible with TEL HDP-CVD models post-2018 (part # TEL-HPA-7150) due to revised thermal profile requirements. Verify via the plate’s serial etch (Sxxxx-YY) to confirm spec alignment.
What to Check Before Buying a Used TEL Bake Plate / Hot Plate Assembly in 2026
- Warping: Use a 12" straight edge and feeler gauge; reject if >5µm deviation.
- Thermal Uniformity: Run a 350°C soak test with 8-point thermocouple array; ±3°C max variance.
- Insulation Integrity: Apply 500VDC via megohmmeter; insulation resistance must exceed 100MΩ.
Recent Market Listings
Updated Sep 30No recent market activity for TEL Bake Plate / Hot Plate Assembly.
Submit a bid to get notified when sellers list this part.
Place a bid →Related Parts
Tokyo Electron
005-50908-1 — Electrostatic Chuck, 300mm (Trias SPA) (Tokyo Electron)
PN: 005-50908-1
Tokyo Electron
3D90-000001-V1 — Process Module Showerhead (Tokyo Electron)
PN: 3D90-000001-V1
Tokyo Electron
3D90-000045-V1 — Heater Block Assembly (Tokyo Electron)
PN: 3D90-000045-V1
Tokyo Electron
3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron)
PN: 3D90-007823-V2
Tokyo Electron
3D90-009123-V1 — Quartz Inner Process Tube, 200mm Vertical Furnace (Tokyo Electron)
PN: 3D90-009123-V1
Tokyo Electron
BSG-001234-01 — Develop Cup Assembly (CLEAN TRACK) (Tokyo Electron)
PN: BSG-001234-01
Quick Info
Get a Quote
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for TEL Bake Plate / Hot Plate Assembly.
All transactions are export compliant · Escrow available · parts@caladansemi.com