Tokyo Electron
TEL Bake Plate / Hot Plate Assembly
Tokyo Electron
TEL Bake Plate / Hot Plate Assembly
Market Price
→ Stable$500–$3K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for TEL Bake Plate / Hot Plate Assembly
Price history and market activity data is being compiled.
How much does a used TEL Bake Plate / Hot Plate Assembly cost in 2026?
A used TEL Bake Plate / Hot Plate Assembly from Tokyo Electron typically sells for $500 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Tokyo Electron Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used TEL Bake Plate / Hot Plate Assembly from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does TEL Bake Plate / Hot Plate Assembly Cost in 2026?
Used units range from $1,200 to $4,500 in 2026, depending on thermal uniformity (±2°C vs ±5°C spec) and age. Refurbished models (certified <3 years post-recalibration) fall between $800 and $3,000. These prices represent 40–60% savings vs new OEM pricing (typically $6,500–$9,000). Note: Plates with >5µm warping (measured via laser interferometry) are excluded from the lower end of the used range due to rework costs. Market demand for 300mm-node compatibility drives premium pricing for units tested above 400°C.
TEL Bake Plate / Hot Plate Assembly Specifications and Compatible Tools
Key specs: 150°C–450°C operating range, 2.5kW power draw, 304 stainless steel construction with ceramic insulation, ±2°C uniformity (per TEL-S-HP-003 rev. B). Compatible with:
- TEL FAS-2000 (2005–2010 production)
- TEL P-5000 PECVD (2008–2015)
- TEL Centura® Thermal (2012–2018)
Exclusion: Not compatible with TEL HDP-CVD models post-2018 (part # TEL-HPA-7150) due to revised thermal profile requirements. Verify via the plate’s serial etch (Sxxxx-YY) to confirm spec alignment.
What to Check Before Buying a Used TEL Bake Plate / Hot Plate Assembly in 2026
- Warping: Use a 12" straight edge and feeler gauge; reject if >5µm deviation.
- Thermal Uniformity: Run a 350°C soak test with 8-point thermocouple array; ±3°C max variance.
- Insulation Integrity: Apply 500VDC via megohmmeter; insulation resistance must exceed 100MΩ.
Recent Market Listings
Updated May 19$425
As-is$1,250
Used$2,250
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $425 | As-is | May 12, 2026 |
| Ask | $1,250 | Used | May 5, 2026 |
| Ask | $2,250 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $500 – $3K
Response within 4 hours. Export compliance handled.
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