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Tokyo Electron

3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron)

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Tokyo Electron

3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron)

Name: 3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron)
Brand: Tokyo Electron
SKU: 3D90-007823-V2

Part No. 3D90-007823-V2

Market Price

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Our sourcing team will find pricing within 4 hours

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron) cost in 2026?

Pricing for used 3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 3D90-007823-V2 — Hot Plate Module, 300mm (CLEAN TRACK LITHIUS Pro) (Tokyo Electron) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

3D90-007823-V2 Specifications and Compatible Tools

Key specs: 3-phase AC, 480V, 30A, 3kW thermal output, 300mm diameter, 350°C max temperature. Compatible with TEL CLEAN TRACK LITHIUS Pro (2018–2022) and ACT12 (2020–2024) systems. Do not install in pre-2018 LITHIUS models using 3D90-007823-V1 due to incompatible thermal sensor interfaces. Verify the 12-pin JST ZH connector matches your tool’s footprint. Units lack ESD protection above 20kV, requiring external suppression for 2023+ systems.

What to Check Before Buying a Used 3D90-007823-V2 in 2026

Thermal Uniformity Test: Use an infrared camera to confirm <±2°C variance across the 300mm surface. Reject units exceeding ±3°C.
Insulation Resistance: Measure with a megohmmeter; values below 100MΩ at 500VDC indicate insulation failure.
Corrosion Inspection: Visually check for pitting on the AlN ceramic substrate. Reject units with >5mm² corrosion.
Bake Cycle Count: Systems post-2020 require <15,000 cycles; older tools tolerate up to 20,000.
RF-Hour Threshold: Units with >45,000 RF-hours (trackable via TEL’s PDM-3000 logs) require full requalification.

Q: Is 3D90-007823-V2 better than the V1 version?
A: Yes. The V2 includes a redesigned thermal sensor and improved ceramic substrate for 15% faster heating. V1 modules lack the 12-pin JST ZH connector.

Q: How long does sourcing take in 2026?
A: 2–4 weeks after confirmation, but delays occur if units require refurbishment.

Q: Can I use this on a 2017 LITHIUS Pro?
A: No. Pre-2018 models require 3D90-007823-V1 with a 10-pin connector.

Q: What test equipment is needed for acceptance?
A: Infrared camera for thermal mapping, megohmmeter for insulation checks, and a TEL-compatible RF-hour counter.