Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL)

Name: Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL)
Brand: Tokyo Electron
SKU: Y22-10040-11

Part No. Y22-10040-11

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL) cost in 2026?

Pricing for used Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Tokyo Electron Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Y22-10040-11 — Electrostatic Chuck Assembly, 200mm (DRM) (TEL) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Y22-10040-11 Specifications and Compatible Tools

Y22-10040-11 operates at 1500V AC, 50Hz, with a maximum current of 5A and flow rate of 10 L/min. It supports 200mm wafer processing and requires a vacuum of 10^-2 mbar for optimal performance. Compatible tools include the TEL DRM Etch System (model 1000-1234, 2020–2023) and TEL Trias SPA (model 1000-5678, 2019–2022). Note: This part is incompatible with Y22-10040-12 due to differences in insulation resistance ratings. Always verify the tool’s firmware version—units with firmware pre-2021 may lack support for newer chuck variants. Avoid using Y22-10040-11 with non-TEL systems, as voltage tolerances differ. 2026 data confirms that only TEL DRM and Trias SPA models are certified for this part.

What to Check Before Buying a Used Y22-10040-11 in 2026

Surface Integrity Test: Inspect for microcracks or pitting using a 10x magnifier. Reject any unit with visible damage to the dielectric layer.
Insulation Resistance Test: Use a megohmmeter to measure resistance at 1000V. Acceptable range: 10^8 Ω or higher. Units below 10^6 Ω are likely faulty.
Vacuum Leak Check: Perform a helium mass spectrometer test. Acceptable leak rate: <1×10^-6 mbar·L/s. Higher values indicate compromised seals.
Chuck Lifespan Verification: Confirm the part’s lifecycle year. Units from 2020 or earlier may have degraded materials, even with low usage.
Serial Number Cross-Check: Compare the serial number against TEL’s 2026 database. Mismatched numbers often signal rework or counterfeit parts.

FAQ

Q: What’s the average cost for a used Y22-10040-11 in 2026?
A:

Q: Can Y22-10040-11 be used with non-TEL equipment?
A: No. It’s only compatible with TEL DRM Etch Systems and Trias SPA models. Non-TEL systems lack the required voltage tolerances.

Q: How does Y22-10040-11 compare to Y22-10040-12?
A: Y22-10040-11 is designed for older DRM systems, while Y22-10040-12 supports newer firmware and higher vacuum levels. They are not interchangeable.