Tokyo Electron Tokyo Electron 6300319 Etch Shield Kit Copper — Shield Kit for Plasma Etch Systems (Tokyo Electron)

How Much Does Tokyo Electron 6300319 Etch Shield Kit (COPPER) Cost in 2026?

The Tokyo Electron 6300319 Etch Shield Kit (COPPER) typically ranges from $1,000 to $1,000 in the used market in 2026, depending on its condition and service history. Units in condition grade B, which is typical for this part, are commonly priced at the lower end of the range. Refurbished units from vendors like Ferrotec and Axus Technology are often available at a 40–60% discount compared to brand-new parts, which can cost between $2,500 and $3,000.

If a facility cannot quickly source a replacement, the downtime can cost up to $10,000 per day, depending on the line’s throughput. It’s important to note that while the price is consistent, the condition of the shield kit can vary significantly. For example, a shield kit with more than 10,000 RF cycles may show signs of wear that affect performance, even if it appears visually intact. Always request a detailed inspection report before purchase.

Tokyo Electron 6300319 Etch Shield Kit (COPPER) Specifications and Compatible Tools

The 6300319 Etch Shield Kit is a copper-based assembly used in plasma etch systems to protect chamber walls from erosion and improve process uniformity. It is commonly rated for up to 15,000 RF cycles or 5 years of continuous use, depending on process conditions. The kit typically includes multiple shield segments and mounting hardware, and it is designed for systems operating at 13.56 MHz RF frequencies.

This part is compatible with older-generation Tokyo Electron plasma etch systems, such as the Etec 5200 and 5500 models, which were in production from 2001 to 2007. It is not compatible with newer systems using the 6300320 shield kit. Using an incompatible shield can lead to uneven etch profiles and chamber damage, which may cost $5,000–$10,000 in repairs. Always verify compatibility with your system’s service manual.

What to Check Before Buying a Used Tokyo Electron 6300319 Etch Shield Kit (COPPER) in 2026

1. RF Cycle Count: Ensure the unit has less than 12,000 RF cycles. Kits with more than 15,000 cycles are likely to show performance degradation.
2. Visual Inspection: Look for pitting, warping, or discoloration on the copper surface. These can indicate thermal stress or chemical exposure.
3. Electrical Continuity Test: Use a multimeter to check for continuity between segments. A failed test means the kit is not electrically stable and should be rejected.
4. Thermal Imaging Test: If available, perform a thermal imaging scan to detect hotspots that could lead to premature failure.
5. Production Year: Units produced before 2005 may have different tolerances and are more prone to wear. Reject any kit with a production year earlier than 2003.

Failure to perform these checks can result in a shield that fails within 3–6 months of installation, leading to $7,000–$12,000 in lost production and repair costs. Always request a full inspection report from the seller before finalizing the purchase.

FAQ

Q: Can I use the 6300319 shield kit in a system that originally used the 6300320?
A: No. The 6300319 is not compatible with systems designed for the 6300320. Using it can cause misalignment and chamber damage, which may cost $8,000 in repairs.

Q: Should I buy a used 6300319 shield kit with more than 13,000 RF cycles?
A: No. Kits with more than 12,000 cycles are at higher risk of failure. A failed shield can cause up to $10,000 in downtime and rework costs.

Q: How long does a 6300319 shield kit typically last in production?
A: On average, it lasts between 4 and 6 years, or up to 15,000 RF cycles, depending on process conditions and maintenance.

Q: What is the best way to test a used 6300319 shield kit before installation?
A: Perform an electrical continuity test and a visual inspection for pitting or warping. A thermal imaging scan is also recommended for a more thorough check.

Q: Is it worth buying a used 6300319 shield kit instead of a new one?
A: Yes, if the unit is in condition grade B or better and has less than 12,000 RF cycles. You can save 40–60% compared to a new part, which is typically $2,500–$3,000.