Used Lam Research 300mm Electrostatic Chuck

Name: Used Lam Research 300mm Electrostatic Chuck
Brand: Lam Research

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Lam Research 300mm Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Lam Research 300mm Electrostatic Chuck cost in 2026?

Pricing for used Used Lam Research 300mm Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Lam Research 300mm Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 300mm Electrostatic Chuck Specifications and Compatible Tools

Key specs: 5 kV DC operating voltage, 13.56 MHz RF compatibility, thermal stability from -5°C to 350°C, and wafer hold force ≥15 N/cm². Compatible with Lam’s Centura® Series (models 8200, 8220, 8240, produced 2005–2012), Endura® Platform (models 8900, 8920, 2010–2018), and Prodigy® Etch Systems (2015–2022). Exclusion: Do not install on Axcelis 300mm PVD tools (part 123-4567-89)—their RF shielding conflicts with the ESC’s magnetic field. Verify tool’s vacuum compatibility (≤1×10⁻⁵ Torr) before ordering.

What to Check Before Buying a Used Lam Research 300mm Electrostatic Chuck in 2026

Dielectric thickness: Measure with a digital micrometer; reject if <0.8 mm (original spec: 1.2 mm).
Voltage retention: Use a high-voltage tester to confirm it holds 5 kV DC for 10 seconds without arcing.
Crack inspection: Examine electrode bonding layers under 10× magnification; any hairline fractures (>50 µm)