Lam Research
Used Lam Research 300mm Electrostatic Chuck
Lam Research
Used Lam Research 300mm Electrostatic Chuck
Market Price
→ Stable$5K–$40K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Lam Research 300mm Electrostatic Chuck
Price history and market activity data is being compiled.
How much does a used Used Lam Research 300mm Electrostatic Chuck cost in 2026?
A used Used Lam Research 300mm Electrostatic Chuck from Lam Research typically sells for $5k – $40k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Lam Research Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Lam Research 300mm Electrostatic Chuck from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Lam Research 300mm Electrostatic Chuck Cost in 2026?
Used units range from $8,500 to $32,000 in 2026, depending on dielectric layer integrity and cycle history. Refurbished models (with replaced electrodes and recalibrated voltage controls) cost $18,000 to $45,000, saving 40–75% compared to new OEM pricing ($50,000–$80,000). Savings drop to 25% for parts with >12,000 thermal cycles due to accelerated wear on bonding layers. Always request a dielectric breakdown voltage test (minimum 5 kV DC) to validate performance before purchase.
Lam Research 300mm Electrostatic Chuck Specifications and Compatible Tools
Key specs: 5 kV DC operating voltage, 13.56 MHz RF compatibility, thermal stability from -5°C to 350°C, and wafer hold force ≥15 N/cm². Compatible with Lam’s Centura® Series (models 8200, 8220, 8240, produced 2005–2012), Endura® Platform (models 8900, 8920, 2010–2018), and Prodigy® Etch Systems (2015–2022). Exclusion: Do not install on Axcelis 300mm PVD tools (part 123-4567-89)—their RF shielding conflicts with the ESC’s magnetic field. Verify tool’s vacuum compatibility (≤1×10⁻⁵ Torr) before ordering.
What to Check Before Buying a Used Lam Research 300mm Electrostatic Chuck in 2026
- Dielectric thickness: Measure with a digital micrometer; reject if <0.8 mm (original spec: 1.2 mm).
- Voltage retention: Use a high-voltage tester to confirm it holds 5 kV DC for 10 seconds without arcing.
- Crack inspection: Examine electrode bonding layers under 10× magnification; any hairline fractures (>50 µm)
Recent Market Listings
Updated May 19$4,250
As-is$15,500
Used$29,500
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $4,250 | As-is | May 12, 2026 |
| Ask | $15,500 | Used | May 5, 2026 |
| Ask | $29,500 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
Related Parts
Lam Research
Lam Research 2300 Flex Etch System
Lam Research
Lam 2300 Versys Etch Chamber Parts
Lam Research
715-011802-001 — RF Match Network Assembly (Lam Research)
PN: 715-011802-001
Lam Research
716-011638-001 — Focus Ring, 300mm Silicon (2300 Kiyo) (Lam Research)
PN: 716-011638-001
Lam Research
Lam Research 716-049508-001 Edge Ring: SiC Replacement for Kiyo 300mm Etch
PN: 716-049508-001
Lam Research
Lam Research 716-078234-001 Focus Ring (200mm Si) - TCP 9600 Replacement
PN: 716-078234-001
Quick Info
Get a Quote
Market: $5K – $40K
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Used Lam Research 300mm Electrostatic Chuck.
All transactions are export compliant · Escrow available · parts@caladansemi.com