Used Lam Research Chamber Liner / Shield

Name: Used Lam Research Chamber Liner / Shield
Brand: Lam Research

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Lam Research Chamber Liner / Shield moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Lam Research Chamber Liner / Shield cost in 2026?

Pricing for used Used Lam Research Chamber Liner / Shield units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Lam Research Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research Chamber Liner Specifications and Compatible Tools

Key specs: quartz or aluminum construction, 12–24mm thickness, max temp 350°C (quartz) or 450°C (aluminum), and 1–5mbar pressure rating. Compatible with Lam Centura platforms (models 5500/5600, 2005–2012), Endura Etch systems (models 9500/9600, 2008–2015), and Prodigy P3000 (2010–2017). Exclusion: Do not install on Lam VersaEtch SE3000 (Part No. LR-CL-SE3K)—incompatible due to divergent RF coupling geometry. Verify tool’s chamber ID (typically 300–450mm) against liner’s OD before purchase.

What to Check Before Buying a Used Lam Research Chamber Liner in 2026

Surface integrity: Inspect for microcracks (>50µm width) using 10x magnifier; reject if >3 cracks per 100cm².
Thickness tolerance: Measure with digital calipers (0.01mm res); deviation >10% from OEM spec voids warranty.
Contamination residue: Run XRF spectroscopy for metallic deposits (e.g., tungsten >5ppm