Used Lam Research Chamber Liner / Shield

Name: Used Lam Research Chamber Liner / Shield
Brand: Lam Research
Price: 3400 USD
Availability: InStock

Market Price

→ Stable

$800–$6K

Typical secondary market pricing · USD

Low $800Avg $3,400High $6,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $800 – $6K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Lam Research Chamber Liner / Shield cost in 2026?

A used Used Lam Research Chamber Liner / Shield from Lam Research typically sells for $800 – $6k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Lam Research Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Lam Research Chamber Liner Cost in 2026?

Used Lam Research chamber liners (Part No. LR-CL-220X) priced between $1,200–$8,500 in 2026, depending on material (quartz vs. aluminum) and tool generation. Refurbished units (certified <500 cycles) range from $1,800–$4,200, saving buyers 60–75% vs. new ($14,000–$18,000). Liners for 300mm tools (e.g., Centura platforms) command a 20–30% premium over 200mm variants. Caveat: Liners with >800 thermal cycles (measured via OEM log tags) show 2–4x higher failure rates in plasma stability tests.

Lam Research Chamber Liner Specifications and Compatible Tools

Key specs: quartz or aluminum construction, 12–24mm thickness, max temp 350°C (quartz) or 450°C (aluminum), and 1–5mbar pressure rating. Compatible with Lam Centura platforms (models 5500/5600, 2005–2012), Endura Etch systems (models 9500/9600, 2008–2015), and Prodigy P3000 (2010–2017). Exclusion: Do not install on Lam VersaEtch SE3000 (Part No. LR-CL-SE3K)—incompatible due to divergent RF coupling geometry. Verify tool’s chamber ID (typically 300–450mm) against liner’s OD before purchase.

What to Check Before Buying a Used Lam Research Chamber Liner in 2026

Surface integrity: Inspect for microcracks (>50µm width) using 10x magnifier; reject if >3 cracks per 100cm².
Thickness tolerance: Measure with digital calipers (0.01mm res); deviation >10% from OEM spec voids warranty.
Contamination residue: Run XRF spectroscopy for metallic deposits (e.g., tungsten >5ppm