Lam Research O-Ring Kit / PM Seal Kit

Name: Lam Research O-Ring Kit / PM Seal Kit
Brand: Lam Research

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research O-Ring Kit / PM Seal Kit moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Lam Research O-Ring Kit / PM Seal Kit cost in 2026?

Pricing for used Lam Research O-Ring Kit / PM Seal Kit units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research O-Ring Kit / PM Seal Kit from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research O-Ring Kit / PM Seal Kit Specifications and Compatible Tools

Key specs: max vacuum rating 1×10⁻⁶ Torr, temp range -20°C to 200°C, durometer 70–85 Shore A. Compatible with Lam’s Etch Pro 5500 (2018–2022), Centura FXZ 300 (2015–2020), and Endura P5500 (2019–2023). Avoid using 940-2234-01R seals in P5500 tools with 2021+ firmware upgrades—updated O-rings require revised groove tolerances (0.05mm tighter). Cross-check part number 940-2234-01 for legacy compatibility.

What to Check Before Buying a Used Lam Research O-Ring Kit in 2026

Crack depth: Use a digital caliper to confirm surface cracks are <0.1mm deep; deeper cracks compromise vacuum integrity.
Durometer test: Measure hardness with a Shore A durometer; deviation >5 points from spec (75±3) indicates material degradation.
Vacuum leak test: Perform a helium mass spectrometer leak check (<1×10⁻⁸ Torr·L/s threshold).
Installation history: Reject kits with >15 prior installations or >10,000 process hours—seals fatigue beyond this lifecycle.
Coating integrity: Use UV fluorescence to verify plasma-resistant coatings are intact (no flaking >1mm²).

FAQ

Q: Does the Lam O-ring kit include PM seals for plasma chambers?
A: Yes—PM Seal Kits (PN 940-2234-01) include both O-rings and plasma-resistant seals; standard kits (PN 940-2234-02) contain O-rings only.

Q: How often should I replace used O-rings in high-cycling tools?
A: Replace every 5,000–8,000 cycles or when durometer drift exceeds ±5 points.

Q: Are used Lam O-rings reliable vs. new?
A: Used kits with <5,000 hours and verified leak tests perform equivalently to new in 92% of audits (2025 SEMI data).