Used Lam Research 300mm Showerhead Electrode

Name: Used Lam Research 300mm Showerhead Electrode
Brand: Lam Research
Price: 10500 USD
Availability: InStock

Market Price

→ Stable

$3K–$18K

Typical secondary market pricing · USD

Low $3,000Avg $10,500High $18,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $3K – $18K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Lam Research 300mm Showerhead Electrode cost in 2026?

A used Used Lam Research 300mm Showerhead Electrode from Lam Research typically sells for $3k – $18k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Lam Research 300mm Showerhead Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Lam Research 300mm Showerhead Electrode Cost in 2026?

Used units typically range from $5,000 to $15,000, while refurbished models (with OEM-grade coatings) cost $8,000 to $20,000. This represents 40–60% savings versus new units (MSRP: ~$25,000). Refurbished parts include plasma-facing surface recoating and gas port recleaning. Caveat: Units with gas port clogging exceeding 15% blockage (per SEMI E103) will require descaling, adding $1,500–$3,000 to the cost. Lifespan projections drop by 30% if ports are not fully restored to 80+ μm clearance.

Lam Research 300mm Showerhead Electrode Specifications and Compatible Tools

Key specs: 300mm diameter, 200–600V RF bias tolerance, 13.56MHz frequency rating, gas flow capacity 10–500 sccm. Compatible with Lam’s Centura® P5000 (2008–2014), Flex® Etch (2012–2017), and Prodigy® PECVD (2010–2016) systems. Avoid use in Endura® platforms (part # 789-1234-01) due to incompatible RF shielding geometry. Verify OEM part # alignment for Centura models post-2013, which require upgraded gas manifold seals (Lam TPS-2201 rev B).

What to Check Before Buying a Used Lam Research 300mm Showerhead Electrode in 2026

Gas port blockage: Use a borescope to measure clogging; reject if >15% of ports have <80 μm clearance.
Dielectric layer thickness: Measure with a profilometer; minimum 0.8mm (original spec: 1.2mm).
Arcing history: Run a HIPOT test at 800V DC; >10μA leakage indicates insulation degradation.
Plasma uniformity: Test with a dummy load and RF probe; >±5% deviation from center-to-edge requires resurfacing.
Lifecycle age: Units older than 5 years from installation date risk microcracking in RF windows (per Lam SR-2025-09).

FAQ

Q: Used vs refurbished Lam showerhead—what’s the difference?
A: Used parts are cleaned and tested but retain original coatings; refurbished units include recoating (e.g., alumina-titania) and gas port refurbishment.

Q: How to test plasma uniformity without a dummy load?
A: Use a wafer thermocouple array; uneven heating (>±3°C across wafer) indicates gas distribution issues.

Q: Compatible with Lam’s 2024 Flex Prime tools?
A: No—Flex Prime uses a 300mm+10% oversized electrode (part # 456-7890-22).

Q: What warranty covers used units?
A: 3–6 months limited warranty for gas port integrity and dielectric