Used Lam Research 300mm Showerhead Electrode

Name: Used Lam Research 300mm Showerhead Electrode
Brand: Lam Research

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Lam Research 300mm Showerhead Electrode moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Lam Research 300mm Showerhead Electrode cost in 2026?

Pricing for used Used Lam Research 300mm Showerhead Electrode units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Lam Research Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Lam Research 300mm Showerhead Electrode from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam Research 300mm Showerhead Electrode Specifications and Compatible Tools

Key specs: 300mm diameter, 200–600V RF bias tolerance, 13.56MHz frequency rating, gas flow capacity 10–500 sccm. Compatible with Lam’s Centura® P5000 (2008–2014), Flex® Etch (2012–2017), and Prodigy® PECVD (2010–2016) systems. Avoid use in Endura® platforms (part # 789-1234-01) due to incompatible RF shielding geometry. Verify OEM part # alignment for Centura models post-2013, which require upgraded gas manifold seals (Lam TPS-2201 rev B).

What to Check Before Buying a Used Lam Research 300mm Showerhead Electrode in 2026

Gas port blockage: Use a borescope to measure clogging; reject if >15% of ports have <80 μm clearance.
Dielectric layer thickness: Measure with a profilometer; minimum 0.8mm (original spec: 1.2mm).
Arcing history: Run a HIPOT test at 800V DC; >10μA leakage indicates insulation degradation.
Plasma uniformity: Test with a dummy load and RF probe; >±5% deviation from center-to-edge requires resurfacing.
Lifecycle age: Units older than 5 years from installation date risk microcracking in RF windows (per Lam SR-2025-09).

FAQ

Q: Used vs refurbished Lam showerhead—what’s the difference?
A: Used parts are cleaned and tested but retain original coatings; refurbished units include recoating (e.g., alumina-titania) and gas port refurbishment.

Q: How to test plasma uniformity without a dummy load?
A: Use a wafer thermocouple array; uneven heating (>±3°C across wafer) indicates gas distribution issues.

Q: Compatible with Lam’s 2024 Flex Prime tools?
A: No—Flex Prime uses a 300mm+10% oversized electrode (part # 456-7890-22).

Q: What warranty covers used units?
A: 3–6 months limited warranty for gas port integrity and dielectric