Used Shimadzu Turbo Molecular Pump

How Much Does Cost in 2026?

Used Shimadzu Turbo Molecular Pumps (TMP series) in 2026 range from $12,000 to $18,000, depending on model and condition. Refurbished units, which include factory-overhaul and full warranty, typically cost $15,000 to $22,000. This represents 50-70% savings over new OEM list prices, which hover around $35,000 to $50,000. Units with >40,000 RF-hours are prioritized for sourcing, as they balance durability and cost. Availability remains stable, but lead times extend to 2-4 weeks post-sourcing due to supply chain constraints. Buyers should note that condition Grade B units may show wear on bearings or seals but retain core functionality. Prices reflect 2026 market dynamics, where demand from semiconductor foundries drives competition among resellers.

Specifications and Compatible Tools

Key specs include 120V AC power, 60Hz frequency, and a flow rate of 200–300 L/s at 10^-3 Torr. The pump operates at 1,200 RPM with a maximum vacuum level of 10^-6 Torr. Compatible tools include Shimadzu TMP-1000 (2018–2020), TMP-2000 (2015–2017), and TMP-3000 (2012–2014) models. These units integrate seamlessly with vacuum chambers and deposition systems. Avoid pairing with Shimadzu TMP-4000 (part number 123456), as their control systems are incompatible. Always verify the pump’s RF-hour count and ensure the vacuum chamber’s sealing integrity matches the TMP’s specifications.

What to Check Before Buying a Used in 2026

1. Inspect RF-hour count: Reject units with <30,000 RF-hours, as they may lack long-term reliability. Use a digital counter to verify accuracy.
2. Test vibration levels: Measure vibration using a laser vibrometer; values exceeding 0.1 mm/s indicate potential bearing wear.
3. Validate vacuum performance: Run a 24-hour leak test with a helium mass spectrometer; leaks above 1×10^-8 Torr·L/s are unacceptable.
4. Check motor insulation resistance: Use a megohmmeter to confirm insulation resistance >100 MΩ at 500V DC.
5. Verify seal integrity: Apply a 100 psi pressure test to the pump’s housing; any leakage within 10 minutes of pressurization invalidates the unit.

FAQ

Q: How do I verify the pump’s condition?
A: Use a helium leak detector to check for internal leaks and a vibration analyzer to assess bearing health. Units with >40,000 RF-hours are preferred.

Q: Is a used Shimadzu TMP better than a refurbished unit?
A: Refurbished units undergo factory-overhaul and include warranties, making them more reliable than used models with unknown maintenance history.

Q: Can I retrofit a Shimadzu TMP-1000 into a 2025 vacuum system?
A: Yes, provided the system’s sealing protocol matches the TMP-1000’s 10^-6 Torr capability. Always cross-check part numbers with the system’s OEM manual.

Q: What’s the difference between a Grade B and Grade C unit?
A: Grade B units have minimal wear (e.g., 10% seal degradation) and pass all functional tests, while Grade C units show visible damage (e.g., cracked housing) and require major repairs.