Used Cryopump for Semiconductor PVD

Cryopump Specifications and Compatible Tools

Key specs: pumping speed 200–800 l/s, ultimate pressure ≤1×10⁻¹⁰ Torr, cooling capacity 50–300 W at 12 K, 480V 3-phase, 60 Hz. Compatible with:

• Brooks CPX-500 (2012–2018) on Applied Materials Endura PVD
• SHI CR-750 (2015–2020) on Lam Research Centura platforms
• Varian VCP-600 (2010–2016) with custom flange adapters

Exclusion: Not compatible with Varian’s VCP-900 (part #VC9-FL-22) due to incompatible ISO 208-KF40 flange. Verify tool’s vacuum port dimensions before purchase.

What to Check Before Buying a Used Cryopump in 2026

1. Cold head cycle count: Use a digital cycle counter (e.g., Brooks CPX-Log) to confirm >5,000 cycles. Reject units with >8,000.
2. Sorption media integrity: Run a helium leak test (≤1×10⁻¹² Pa·m³/s) using a Pfeiffer QMS 200. Fail if baseline pressure exceeds 5×10⁻¹¹ Torr.
3. Frost buildup: Visually inspect cold head for ice crystals (indicates refrigerant leak). Reject if frost forms within 30 mins of cooldown.
4. Power draw: Measure startup current with a Fluke 434 II. Acceptable range: 18–24 A at 480V. Exceeding 26 A signals motor wear.
5. Maintenance history: Require logs from 2020 onward. Units over 12 years old need full refurbishment.

FAQ

Q: Used vs refurbished cryopump—what’s the difference?
A: Used units are resold as-is; refurbished have replaced sorption media, vacuum seals, and cold head gaskets. Refurbished reduces