Used Cryopump for Semiconductor PVD

Name: Used Cryopump for Semiconductor PVD
Brand: Various (Brooks, SHI)
Price: 9000 USD
Availability: InStock

Market Price

→ Stable

$3K–$15K

Typical secondary market pricing · USD

Low $3,000Avg $9,000High $15,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $3K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Cryopump for Semiconductor PVD

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How much does a used Used Cryopump for Semiconductor PVD cost in 2026?

A used Used Cryopump for Semiconductor PVD from Various (Brooks, SHI) typically sells for $3k – $15k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (Brooks, SHI) Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Cryopump for Semiconductor PVD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Cryopump for Semiconductor PVD Cost in 2026?

Used cryopumps for PVD systems in 2026 range from $4,200 to $18,500, depending on pumping speed (200–800 l/s) and OEM. Refurbished units average $6,800–$12,000, saving 40–65% vs new (which exceed $25k). Savings drop to 25% for high-speed models (>600 l/s) due to demand. Key caveat: cold head cycle life must exceed 5,000 thermal cycles (check OEM logs). Units with <3,000 cycles risk premature sorption media failure.

Cryopump Specifications and Compatible Tools

Key specs: pumping speed 200–800 l/s, ultimate pressure ≤1×10⁻¹⁰ Torr, cooling capacity 50–300 W at 12 K, 480V 3-phase, 60 Hz. Compatible with:

Brooks CPX-500 (2012–2018) on Applied Materials Endura PVD
SHI CR-750 (2015–2020) on Lam Research Centura platforms
Varian VCP-600 (2010–2016) with custom flange adapters

Exclusion: Not compatible with Varian’s VCP-900 (part #VC9-FL-22) due to incompatible ISO 208-KF40 flange. Verify tool’s vacuum port dimensions before purchase.

What to Check Before Buying a Used Cryopump in 2026

Cold head cycle count: Use a digital cycle counter (e.g., Brooks CPX-Log) to confirm >5,000 cycles. Reject units with >8,000.
Sorption media integrity: Run a helium leak test (≤1×10⁻¹² Pa·m³/s) using a Pfeiffer QMS 200. Fail if baseline pressure exceeds 5×10⁻¹¹ Torr.
Frost buildup: Visually inspect cold head for ice crystals (indicates refrigerant leak). Reject if frost forms within 30 mins of cooldown.
Power draw: Measure startup current with a Fluke 434 II. Acceptable range: 18–24 A at 480V. Exceeding 26 A signals motor wear.
Maintenance history: Require logs from 2020 onward. Units over 12 years old need full refurbishment.

FAQ

Q: Used vs refurbished cryopump—what’s the difference?
A: Used units are resold as-is; refurbished have replaced sorption media, vacuum seals, and cold head gaskets. Refurbished reduces