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MKS Instruments

MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools

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MKS Instruments

MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools

Part No. 390HA-100C

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools cost in 2026?

Pricing for used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments Vacuum vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS 390HA-100C Specifications and Compatible Tools

  • Full-scale range: 100 Torr absolute/differential
  • Accuracy: ±0.25% FS
  • Response time: <10 ms
  • Operating temp: -20°C to 70°C
  • Voltage: 12–36 VDC
    Compatible with:
  • Applied Materials Centura 300mm DPS II (2008–2015)
  • Lam Research Kiyo F (2012–2018)
  • ASMI FlexAL 5500 (2014–2020)
    Warning: Incompatible with Tokyo Electron Lambda Flex (part #TE-PS-10C uses 10 Torr range).

What to Check Before Buying a Used MKS 390HA-100C in 2026

  1. Physical damage: Reject units with cracked ceramic diaphragms (visible under 10× magnifier).
  2. Continuity test: Use a multimeter to

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategoryVacuum

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