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MKS Instruments

MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools

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MKS Instruments

MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools

Part No. 390HA-100C

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Available by Request
Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

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How much does a used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools cost in 2026?

Pricing for used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used MKS Instruments Vacuum vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2–6 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2–6 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does MKS 390HA-100C Cost in 2026?

Used units range from $1,200–$1,800 depending on calibration history and prior installation environment. Refurbished models (with OEM-certified recalibration) cost $2,500–$3,000, saving 60–70% vs new ($8,500–$10,000). Caveat: Units with calibration expiration dates beyond 2028 add $300–$500 to the base price. Avoid parts with >5 years of continuous operation without rebuild logs—failure rates jump to 22% post-threshold.

MKS 390HA-100C Specifications and Compatible Tools

  • Full-scale range: 100 Torr absolute/differential
  • Accuracy: ±0.25% FS
  • Response time: <10 ms
  • Operating temp: -20°C to 70°C
  • Voltage: 12–36 VDC
    Compatible with:
  • Applied Materials Centura 300mm DPS II (2008–2015)
  • Lam Research Kiyo F (2012–2018)
  • ASMI FlexAL 5500 (2014–2020)
    Warning: Incompatible with Tokyo Electron Lambda Flex (part #TE-PS-10C uses 10 Torr range).

What to Check Before Buying a Used MKS 390HA-100C in 2026

  1. Physical damage: Reject units with cracked ceramic diaphragms (visible under 10× magnifier).
  2. Continuity test: Use a multimeter to

Recent Market Listings

Updated May 19

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Related Parts

Quick Info

ConditionUsed
CategoryVacuum

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