ASM International
Used ASM E800 Diffusion / LPCVD System
ASM International
Used ASM E800 Diffusion / LPCVD System
Market Price
→ Stable$15K–$75K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used ASM E800 Diffusion / LPCVD System
Price history and market activity data is being compiled.
How much does a used Used ASM E800 Diffusion / LPCVD System cost in 2026?
A used Used ASM E800 Diffusion / LPCVD System from ASM International typically sells for $15k – $75k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used ASM International Systems & Tools vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used ASM E800 Diffusion / LPCVD System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used ASM E800 Diffusion / LPCVD System Cost in 2026?
Used ASM E800 systems typically range from $250,000 to $450,000 in 2026, depending on chamber condition, gas manifold upgrades, and wafer capacity (50–100+ wafer batches). Refurbished units with replaced heater elements and quartz tubes fall between $350,000 and $600,000. This represents 40–60% savings compared to new systems priced above $1 million.
Caveat: Systems older than 15 years (pre-2008 manufacture) often require $50k–$100k in preventive maintenance for pressure control valves and PID controllers. Always verify gas leak rates (<1×10⁻⁶ mbar·L/sec) during inspection.
ASM E800 Specifications and Compatible Tools
Key specs: Vertical tube furnace, 150–200mm wafer compatibility, batch size 50–100 wafers, temperature range 400–1,200°C, pressure control 1–500 Torr. Uses resistive heating with silicon carbide or quartz tubes.
Compatible tools:
- Applied Materials Centura® LPCVD (1998–2005 models)
- Lam Research P5i® Diffusion (2001–2007 production)
- Tokyo Electron TE-S1200 (with custom gas manifold adapters)
Exclusion: Incompatible with Tokyo Electron LPCVD TEL-8000 series due to mismatched gas inlet port threading (ASM uses ¼"-28 NPT vs TEL’s ¼"-20). Verify with part number ASM-E800-GM-03 gas manifold specs.
What to Check Before Buying a Used ASM E800 in
Recent Market Listings
Updated May 19$12,750
As-is$33,000
Used$57,000
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $12,750 | As-is | May 12, 2026 |
| Ask | $33,000 | Used | May 5, 2026 |
| Ask | $57,000 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $15K – $75K
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