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MKS Instruments

1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)

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MKS Instruments

1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)

Part No. 1179A-00010SV

Market Price

→ Stable

$632$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320
Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) cost in 2026?

A used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)
Save 50-70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 1179A-00010SV Cost in 2026?

Used units range from $632–$1,850; refurbished models cost $1,850–$3,320. New OEM pricing exceeds $5,000, offering 40–70% savings with used/refurbished options. Caveat: Units with calibration certificates older than 5 years may require $150–$300 recertification, impacting total cost. Market demand for 10 sccm controllers remains stable due to legacy tool prevalence in 2000–2010-era fabs.

1179A-00010SV Specifications and Compatible Tools

  • Flow range: 0–10 sccm
  • Accuracy: ±1.0% of reading ±0.5% FS
  • Power: 12–36 VDC, 0.5 W typical
  • Response time: <100 ms
  • Operating temp: –20°C to +70°C

Compatible tools include:

  • Applied Materials Centura (1998–2005)
  • Lam Research Endace (2000–2007)
  • Tokyo Electron Lambda (2002–2012)

Exclusion: Not compatible with MKS 1179A-00020SV (20 sccm) due to divergent pressure compensation algorithms. Verify firmware revision (Rev C or later) for compatibility with 2015+ tool variants.

What to Check Before Buying a Used 1179A-00010SV in 2026

  1. Diaphragm wear: Measure thickness with micrometer; reject if <0.8 mm (original spec: 1.2 mm).
  2. Voltage stability: Use multimeter; output must remain within ±5% of rated 24 VDC under load.
  3. Flow accuracy: Test with dry gas standard; deviation >±1.5% requires recalibration.
  4. O-ring integrity: Inspect for cracks or hardening; replace if used in >200,000 cumulative hours.
  5. Calibration date: Units older than 3 years without recertification risk noncompliance with ISO 17025 standards.

FAQ

Q: Is 1179A-00010SV compatible with KLA-Hermes 300?
A: Yes, but requires firmware upgrade to Rev D (available via MKS support).

Q: Used vs refurbished — which is better?
A: Refurbished includes recalibration and 1-year warranty; used may need $100–$250 in parts (e.g., O-rings).

Q: Can I use 1179A-00010SV in a 50 Hz system?
A: Yes, but verify power supply compatibility (spec: 47–63 Hz).

**Q: 1

Recent Market Listings

Updated May 19
AskMay 12, 2026

$537

As-is
AskMay 5, 2026

$1,438

Used
AskApr 28, 2026

$2,514

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
GradeB
CategoryParts & Consumables
Lead Time2-4 weeks after sourcing

Get a Quote

Market: $632 – $3K

Response within 4 hours. Export compliance handled.

Email parts@caladansemi.com

Or call us during business hours

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