1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)

1179A-00010SV Specifications and Compatible Tools

• Flow range: 0–10 sccm
• Accuracy: ±1.0% of reading ±0.5% FS
• Power: 12–36 VDC, 0.5 W typical
• Response time: <100 ms
• Operating temp: –20°C to +70°C

Compatible tools include:

• Applied Materials Centura (1998–2005)
• Lam Research Endace (2000–2007)
• Tokyo Electron Lambda (2002–2012)

Exclusion: Not compatible with MKS 1179A-00020SV (20 sccm) due to divergent pressure compensation algorithms. Verify firmware revision (Rev C or later) for compatibility with 2015+ tool variants.

What to Check Before Buying a Used 1179A-00010SV in 2026

1. Diaphragm wear: Measure thickness with micrometer; reject if <0.8 mm (original spec: 1.2 mm).
2. Voltage stability: Use multimeter; output must remain within ±5% of rated 24 VDC under load.
3. Flow accuracy: Test with dry gas standard; deviation >±1.5% requires recalibration.
4. O-ring integrity: Inspect for cracks or hardening; replace if used in >200,000 cumulative hours.
5. Calibration date: Units older than 3 years without recertification risk noncompliance with ISO 17025 standards.

FAQ

Q: Is 1179A-00010SV compatible with KLA-Hermes 300?
A: Yes, but requires firmware upgrade to Rev D (available via MKS support).

Q: Used vs refurbished — which is better?
A:

Q: Can I use 1179A-00010SV in a 50 Hz system?
A: Yes, but verify power supply compatibility (spec: 47–63 Hz).