MKS Instruments
1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)
MKS Instruments
1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)
Part No. 1179A-00010SV
Market Price
→ Stable$632–$3K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments)
Price history and market activity data is being compiled.
How much does a used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) cost in 2026?
A used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used MKS Instruments Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does 1179A-00010SV Cost in 2026?
Used units range from $632–$1,850; refurbished models cost $1,850–$3,320. New OEM pricing exceeds $5,000, offering 40–70% savings with used/refurbished options. Caveat: Units with calibration certificates older than 5 years may require $150–$300 recertification, impacting total cost. Market demand for 10 sccm controllers remains stable due to legacy tool prevalence in 2000–2010-era fabs.
1179A-00010SV Specifications and Compatible Tools
- Flow range: 0–10 sccm
- Accuracy: ±1.0% of reading ±0.5% FS
- Power: 12–36 VDC, 0.5 W typical
- Response time: <100 ms
- Operating temp: –20°C to +70°C
Compatible tools include:
- Applied Materials Centura (1998–2005)
- Lam Research Endace (2000–2007)
- Tokyo Electron Lambda (2002–2012)
Exclusion: Not compatible with MKS 1179A-00020SV (20 sccm) due to divergent pressure compensation algorithms. Verify firmware revision (Rev C or later) for compatibility with 2015+ tool variants.
What to Check Before Buying a Used 1179A-00010SV in 2026
- Diaphragm wear: Measure thickness with micrometer; reject if <0.8 mm (original spec: 1.2 mm).
- Voltage stability: Use multimeter; output must remain within ±5% of rated 24 VDC under load.
- Flow accuracy: Test with dry gas standard; deviation >±1.5% requires recalibration.
- O-ring integrity: Inspect for cracks or hardening; replace if used in >200,000 cumulative hours.
- Calibration date: Units older than 3 years without recertification risk noncompliance with ISO 17025 standards.
FAQ
Q: Is 1179A-00010SV compatible with KLA-Hermes 300?
A: Yes, but requires firmware upgrade to Rev D (available via MKS support).
Q: Used vs refurbished — which is better?
A: Refurbished includes recalibration and 1-year warranty; used may need $100–$250 in parts (e.g., O-rings).
Q: Can I use 1179A-00010SV in a 50 Hz system?
A: Yes, but verify power supply compatibility (spec: 47–63 Hz).
**Q: 1
Recent Market Listings
Updated May 19$537
As-is$1,438
Used$2,514
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $537 | As-is | May 12, 2026 |
| Ask | $1,438 | Used | May 5, 2026 |
| Ask | $2,514 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
Related Parts
MKS Instruments
Used MKS Instruments Mass Flow Controller
MKS Instruments
MKS 122AA-01000AB Baratron Transducer - Absolute Pressure Reference for Gas Panels & Forelines
PN: 122AA-01000AB
MKS Instruments
2179A-01000SV — Mass Flow Controller, 1000 sccm N2 (MKS Instruments)
PN: 217A-01000SV
MKS Instruments
MKS 2179A-10L00SV Mass Flow Controller | 10 slpm N2 for CVD/Etch Purge
PN: 2179A-10L00SV
MKS Instruments
MKS 253B Exhaust Throttle Valve
MKS Instruments
MKS 390HA-100C Baratron Replacement: 100 Torr Pressure Sensor for PECVD/ALD Tools
PN: 390HA-100C
Quick Info
Get a Quote
Market: $632 – $3K
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for 1179A-00010SV — Mass Flow Controller, 10 sccm (MKS Instruments).
All transactions are export compliant · Escrow available · parts@caladansemi.com