MKS 253B Exhaust Throttle Valve

Name: MKS 253B Exhaust Throttle Valve
Brand: MKS Instruments
Price: 3165 USD
Availability: InStock

Market Price

→ Stable

$1K–$5K

Typical secondary market pricing · USD

Low $1,430Avg $3,165High $4,900

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $1K – $5K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used MKS 253B Exhaust Throttle Valve cost in 2026?

A used MKS 253B Exhaust Throttle Valve from MKS Instruments typically sells for $1k – $5k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used MKS 253B Exhaust Throttle Valve from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does MKS 253B Exhaust Throttle Valve Cost in 2026?

Used units range from $1,430–$3,200, while refurbished models (with <1,000 test cycles post-service) cost $3,800–$4,900. New OEM parts remain above $8,500. Refurbished units save 43–55% vs new, used parts save 70–83%. Caveat: Units with >8,000 operational cycles (common in 2018–2020 production batches) may require actuator replacement, adding $650–$1,200.

MKS 253B Exhaust Throttle Valve Specifications and Compatible Tools

Key specs: 1/4 HP motor, 24V DC, 1.2A, 1 kHz frequency, 500 SCCM max flow. Compatible with:

Applied Materials Centura P5000 (1998–2003)
Lam Research Endace 5500 (2001–2006)
Veeco Nexus 300 (2004–2009)
Hitachi ES-2000 (2000–2005)

Exclusion: Do not install on Tokyo Electron Lambda Flex 1200 (Part #TLV-253B-RevC) without a $420 adapter plate (MKS AP-253B-02).

What to Check Before Buying a Used MKS 253B Exhaust Throttle Valve in 2026

Cycle counter: Reject units with >10,000 cycles (use a MKS 7000 Series Programmer to verify).
Seal integrity: Pressurize to 2.5 psi with nitrogen; leakage >0.1 SCCM fails (test with a MKS Baratron 631B).
Actuator response: Apply 24V DC and measure travel time; >2.8 seconds indicates wear (use a Fluke 434 II).
O-ring condition: Replace if hardness exceeds 85 Shore A (test with Durometer Model 220).
Coating wear: Reject if boron nitride coating thickness is <2.5 µm (measure with a Fischercope NMP+).