Used MKS Instruments Mass Flow Controller

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used MKS Instruments Mass Flow Controller cost in 2026?

Pricing for used Used MKS Instruments Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used MKS Instruments Gas Delivery vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS Instruments Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Overview

The MKS 1179A mass flow controller is an industry-standard device for precision gas flow control in semiconductor process equipment. This used unit has been professionally recalibrated to factory specification and certified for the listed gas and flow range. MFCs are essential components in CVD, etch, and implant systems, controlling the flow of process gases with high accuracy and repeatability. Each unit is leak-tested and verified across its full flow range.

Specifications

Manufacturer	MKS Instruments
Model	1179A
Full Scale Range	1000 sccm N₂ equivalent
Gas	N₂ (configured; other gases available)
Accuracy	±1% of full scale
Repeatability	±0.2% of full scale
Inlet Pressure	15–50 psig
Fittings	1/4" Swagelok VCR
Condition	Used / Recalibrated
Calibration	NIST-traceable certificate included
Warranty	90-day functional warranty

Recent Market Listings

Updated May 19

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Frequently Asked Questions

Is the MFC calibrated for my specific gas?

This unit is calibrated for N₂. We can recalibrate for other gases including Ar, O₂, H₂, He, and process gases upon request. Provide your target gas and flow range when ordering.

What calibration documentation is included?

A full NIST-traceable calibration certificate with measured linearity data points is included. Calibration is performed with a certified primary flow standard.

What connector type does this MFC use?

The 1179A uses a standard 15-pin D-sub connector. It is compatible with most MKS and third-party readout/control units including the MKS 247D and PR4000.

Can I return or exchange if the MFC doesn't meet spec in my process?

Yes. We offer a 90-day warranty. If the unit fails to meet published spec under normal operating conditions, we will repair, replace, or issue a refund at our discretion.