MKS Instruments
MKS 627D/628D Baratron Capacitance Manometer
MKS Instruments
MKS 627D/628D Baratron Capacitance Manometer
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
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Pricing
Price on request — quote in 4 hours
Market pricing for MKS 627D/628D Baratron Capacitance Manometer moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used MKS 627D/628D Baratron Capacitance Manometer cost in 2026?
Pricing for used MKS 627D/628D Baratron Capacitance Manometer units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used MKS 627D/628D Baratron Capacitance Manometer from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
MKS 627D/628D Specifications and Compatible Tools
Operates 0.0001–1000 Torr, ±0.5% accuracy, 12–36V DC power, 1–10 kHz frequency response. Compatible with:
- Applied Materials Centura (1998–2005, model 8920-64232)
- Lam Research Endura (2000–2007, model 9580-4112A)
- Tokyo Electron Lambda Flex (2002–2009, model TE-7324-12)
Exclusion: Not compatible with Varian 300mm PECVD (part 628D-Mod3) due to differential pressure offset errors. Verify tool’s vacuum controller firmware version (v3.2+ required for 627D).
What to Check Before Buying a Used MKS 627D/628D in 2026
- Diaphragm wear: Use a laser interferometer to measure flatness; reject if deviation >2µm (spec per MKS 627D-Eng-04).
- Electrical continuity: Measure coil resistance with a multimeter; 1.2–1.5Ω for 627D, 1.0–1.3Ω for 628D.
- Calibration logs: Demand NIST-traceable certs from 2021 onward; recalibrate if >5 years old.
- Port erosion: Inspect ¼” Conflat flanges for >50µm wear using a micrometer.
- Cycle count: Query PLC logs for pressure cycles; >80,000 cycles correlates with 30% failure risk (MKS 2023 field data).
FAQ
A
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