MKS Instruments
MKS 627D/628D Baratron Capacitance Manometer
MKS Instruments
MKS 627D/628D Baratron Capacitance Manometer
Market Price
→ Stable$728–$4K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for MKS 627D/628D Baratron Capacitance Manometer
Price history and market activity data is being compiled.
How much does a used MKS 627D/628D Baratron Capacitance Manometer cost in 2026?
A used MKS 627D/628D Baratron Capacitance Manometer from MKS Instruments typically sells for $728 – $4k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used MKS 627D/628D Baratron Capacitance Manometer from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does MKS 627D/628D Baratron Capacitance Manometer Cost in 2026?
Used units range from $728–$1,200, while refurbished models (with recalibration and seal replacement) cost $1,800–$3,560. New OEM units exceed $12,000, offering ~75–90% savings with used/refurbished options. Caveat: Units with >10 years of lifecycle (pre-2016 installs) require vacuum decay testing (per MKS 627D-TP-09 protocol) to confirm diaphragm integrity. Avoid parts with >50,000 pressure cycles without recent capacitance recalibration.
MKS 627D/628D Specifications and Compatible Tools
Operates 0.0001–1000 Torr, ±0.5% accuracy, 12–36V DC power, 1–10 kHz frequency response. Compatible with:
- Applied Materials Centura (1998–2005, model 8920-64232)
- Lam Research Endura (2000–2007, model 9580-4112A)
- Tokyo Electron Lambda Flex (2002–2009, model TE-7324-12)
Exclusion: Not compatible with Varian 300mm PECVD (part 628D-Mod3) due to differential pressure offset errors. Verify tool’s vacuum controller firmware version (v3.2+ required for 627D).
What to Check Before Buying a Used MKS 627D/628D in 2026
- Diaphragm wear: Use a laser interferometer to measure flatness; reject if deviation >2µm (spec per MKS 627D-Eng-04).
- Electrical continuity: Measure coil resistance with a multimeter; 1.2–1.5Ω for 627D, 1.0–1.3Ω for 628D.
- Calibration logs: Demand NIST-traceable certs from 2021 onward; recalibrate if >5 years old.
- Port erosion: Inspect ¼” Conflat flanges for >50µm wear using a micrometer.
- Cycle count: Query PLC logs for pressure cycles; >80,000 cycles correlates with 30% failure risk (MKS 2023 field data).
FAQ
Q: Is used 627D reliable for 300mm wafer tools?
A
Recent Market Listings
Updated May 19$619
As-is$1,578
Used$2,710
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $619 | As-is | May 12, 2026 |
| Ask | $1,578 | Used | May 5, 2026 |
| Ask | $2,710 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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