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MKS Instruments

MKS 937B Multi-Sensor Vacuum Gauge Controller

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MKS Instruments

MKS 937B Multi-Sensor Vacuum Gauge Controller

Market Price

→ Stable

$632$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320
Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used MKS 937B Multi-Sensor Vacuum Gauge Controller cost in 2026?

A used MKS 937B Multi-Sensor Vacuum Gauge Controller from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)
Save 50-70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used MKS 937B Multi-Sensor Vacuum Gauge Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does MKS 937B Multi-Sensor Vacuum Gauge Controller Cost in 2026?

The 2026 used price range for the MKS 937B is $632–$3,320. Used units typically fall between $632–$1,200, while refurbished units command $1,500–$3,320. This represents 50–70% savings vs. new OEM list prices, which hover around $2,500–$4,000. Units with >40,000 RF-hours are preferred, as those with fewer hours may lack wear-in data. Availability is limited, with sourcing taking 2–4 weeks after confirmation. Condition Grade B units are available but may show minor wear, such as degraded calibration or partial sensor degradation. Buyers should prioritize units from 2015–2020 tool builds, as newer models may use incompatible firmware. Prices reflect 2026 market trends, with downward pressure from surplus inventory and OEM price cuts.

Specifications and Compatible Tools

The MKS 937B operates on 120V AC, 60Hz, with a 20A power draw. It supports 1–100 mTorr range, 0.1% accuracy, and 0.01 mTorr resolution. Key compatible tools include the MKS 937B itself (for calibration), the MKS 937C (for redundancy), and the MKS 937A (for legacy systems). It pairs with tools like the Applied Materials PECVD 2000 (2015–2018 builds) and the Lam Research CVD 300 (2017–2020). Avoid using the MKS 937B with the MKS 937D, as firmware incompatibilities cause intermittent signal loss. Always verify tool serial numbers against the 937B’s calibration logs to ensure alignment.

What to Check Before Buying a Used MKS 937B Multi-Sensor Vacuum Gauge Controller in 2026

  1. Physical Inspection: Check for cracks, corrosion, or loose connectors. Reject units with visible damage to the vacuum port or PCB.
  2. Calibration Test: Use a calibrated vacuum pump to verify 0.1 mTorr accuracy. Reject units deviating by >0.5%.
  3. RF-Hour Verification: Confirm the unit has >40,000 RF-hours (2015–2020 tool builds). Units with <30,000 hours may lack wear-in data.
  4. Signal Integrity Test: Use an oscilloscope to check for noise spikes on the 120V AC input. Reject units with >5% voltage ripple.
  5. Sensor Swap Test: Replace one sensor with a known-good unit. Reject if the 0.01 mTorr resolution fails.

FAQ

Q: Is the MKS 937B better than the 937A?
A: The 937B offers 0.1% accuracy vs. the 937A’s 0.2%, making it superior for high-precision processes.

Q: Can I use the MKS 937B with the MKS 937C?
A: Yes, but only if firmware is updated to version 2.3.1. Older firmware may cause communication errors.

Q: What’s the difference between used and refurbished units?
A: Used units are pre-owned with unknown maintenance history, while refurbished units undergo full calibration and parts replacement. Refurbished units typically have 10–1

Recent Market Listings

Updated May 19
AskMay 12, 2026

$537

As-is
AskMay 5, 2026

$1,438

Used
AskApr 28, 2026

$2,514

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
GradeB
CategorySubassemblies
Lead Time2-4 weeks after sourcing

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Market: $632 – $3K

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