Silicon Focus Ring for Etch Chambers

Name: Silicon Focus Ring for Etch Chambers
Brand: Various (AMAT, Lam, TEL)
Price: 2400 USD
Availability: InStock

Market Price

→ Stable

$800–$4K

Typical secondary market pricing · USD

Low $800Avg $2,400High $4,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $800 – $4K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Silicon Focus Ring for Etch Chambers cost in 2026?

A used Silicon Focus Ring for Etch Chambers from Various (AMAT, Lam, TEL) typically sells for $800 – $4k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Silicon Focus Ring for Etch Chambers from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Silicon Focus Ring for Etch Chambers Cost in 2026?

Used silicon focus rings for etch chambers (AMAT, Lam, TEL) will range from $1,200 to $2,800 in 2026, depending on OEM and cycle history. Refurbished units (with silicon reprofiling and dielectric coating) will cost $2,500 to $4,500. This represents 40–60% savings versus new parts ($4,000–$7,500).

Caveat: Rings with >50 etch cycles in high-density plasma (HDP) tools show >15% thickness erosion, reducing plasma uniformity below 3σ < 5% spec. Always verify cycle count via chamber log or part serial number.

Silicon Focus Ring Specifications and Compatible Tools

Key specs: Silicon grade (99.99% pure, 15–20mm thickness, 250–350mm OD), dielectric constant 11.7–12.3 @ 1MHz, thermal expansion 2.6ppm/°C.

Compatible tools:

AMAT Centura (Model 5500, 2012–2018)
Lam P5 (Model 5550i, 2015–2020)
TEL FAS-2000 (Model FAS-2000X, 2013–2019)

Exclusion: Do not install on AMAT 5550-0010 chambers using boron-doped silicon rings (Part #SR-AMAT-BD). Incompatibility causes arcing due to mismatched resistivity (10^14 Ω·cm vs. 10^16 Ω·cm).

What to Check Before Buying a Used Silicon Focus Ring in 2026

Thickness loss: Measure with digital caliper (0–100mm range). Reject if <85% of nominal spec (e.g., 15mm → 12.75mm).
Surface roughness: Use 3D profilometer (e.g., Bruker ContourGT). Ra > 0.5μm indicates micro-cracking from thermal cycling.
Dielectric integrity: Apply 1kV AC hipot test (Megger MIT550). Leakage >10nA fails.
Etch cycle count: Cross-reference part SN