Silicon Focus Ring for Etch Chambers

Name: Silicon Focus Ring for Etch Chambers
Brand: Various (AMAT, Lam, TEL)

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Silicon Focus Ring for Etch Chambers moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Silicon Focus Ring for Etch Chambers cost in 2026?

Pricing for used Silicon Focus Ring for Etch Chambers units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Silicon Focus Ring for Etch Chambers from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Silicon Focus Ring Specifications and Compatible Tools

Key specs: Silicon grade (99.99% pure, 15–20mm thickness, 250–350mm OD), dielectric constant 11.7–12.3 @ 1MHz, thermal expansion 2.6ppm/°C.

Compatible tools:

AMAT Centura (Model 5500, 2012–2018)
Lam P5 (Model 5550i, 2015–2020)
TEL FAS-2000 (Model FAS-2000X, 2013–2019)

Exclusion: Do not install on AMAT 5550-0010 chambers using boron-doped silicon rings (Part #SR-AMAT-BD). Incompatibility causes arcing due to mismatched resistivity (10^14 Ω·cm vs. 10^16 Ω·cm).

What to Check Before Buying a Used Silicon Focus Ring in 2026

Thickness loss: Measure with digital caliper (0–100mm range). Reject if <85% of nominal spec (e.g., 15mm → 12.75mm).
Surface roughness: Use 3D profilometer (e.g., Bruker ContourGT). Ra > 0.5μm indicates micro-cracking from thermal cycling.
Dielectric integrity: Apply 1kV AC hipot test (Megger MIT550). Leakage >10nA fails.
Etch cycle count: Cross-reference part SN