Used Electrostatic Chuck (ESC)

Name: Used Electrostatic Chuck (ESC)
Brand: Various (AMAT, Lam, TEL)

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Electrostatic Chuck (ESC) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Electrostatic Chuck (ESC) cost in 2026?

Pricing for used Used Electrostatic Chuck (ESC) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Electrostatic Chuck (ESC) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs for Used ESCs include RF power ratings of 15–50 kW, operating frequencies of 13.56 MHz, and voltage tolerances of ±10%. Most units support flow rates of 5–20 sccm, with insulation resistance above 100 MΩ. Compatible tools include AMAT’s Centura iPulse (models 1000–1200, 2020–2023), Lam’s Allegro 300 (models 300-1000, 2018–2022), and TEL’s Pegasus 400 (models 400-200, 2019–2024). Note that ESCs with part numbers starting with “LAM-ESC-” may not interface with TEL’s newer Pegasus 500 series. Always confirm OEM-specific part numbers before installation. 2026 ESCs often lack original documentation, so buyers should request service records or OEM certifications.

What to Check Before Buying a Used Electrostatic Chuck in 2026

RF Power Output Test: Use a vector network analyzer to measure output within ±5% of OEM specs. Units below 90% of rated power are unsuitable.
Insulation Resistance Test: Apply 1,000 VDC and verify resistance >100 MΩ. Values below 50 MΩ indicate potential arcing risks.
Thermal Cycling Test: Subject the ESC to 100 cycles of 25°C–150°C. Rejections occur if thermal expansion causes electrode misalignment.
Voltage Tolerance Check: Measure AC voltage at 13.56 MHz; deviations beyond ±10% require recalibration.
Lifecycle Verification: Confirm the ESC was last serviced in 2022 or later. Units with >10 years of uptime may have degraded dielectric materials.

FAQ

Q: What’s the difference between a used AMAT ESC and a refurbished Lam ESC?
A: AMAT ESCs typically have higher RF power ratings (50 kW vs. 35 kW) and are more common in 2026 due to legacy tool adoption. Refurbished Lam ESCs may include updated insulation coatings but lack AMAT’s proprietary electrode geometry.

Q: Can a TEL ESC replace an AMAT Centura iPulse?
A: No. TEL ESCs (e.g., TEL-ESC-400) are incompatible with AMAT’s Centura iPulse due to different RF coupling designs. Always match OEM-specific part numbers.

Q: Are 2026 ESCs from Lam better than those from TEL?
A: Lam ESCs in 2026 show 15% lower thermal drift than TEL units, but TEL models offer better voltage stability. Choose based on tool compatibility and process requirements.