Various (AMAT, Lam, TEL)
Used Shadow Ring for Semiconductor Equipment
Various (AMAT, Lam, TEL)
Used Shadow Ring for Semiconductor Equipment
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Shadow Ring for Semiconductor Equipment moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Shadow Ring for Semiconductor Equipment cost in 2026?
Pricing for used Used Shadow Ring for Semiconductor Equipment units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Shadow Ring for Semiconductor Equipment from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Shadow Ring Specifications and Compatible Tools
Key specs: Outer diameter 150–300mm, thickness 10–20mm, max operating temp 400°C, and surface roughness <0.1µm Ra. Compatible with:
- AMAT Endura P5000 (2012–2018)
- Lam P5-200 (2015–2020)
- TEL FAS-2000i (2014–2019)
Warning: Do not install on AMAT Centura platforms using part #5532-0010 without a modified base plate—misalignment causes particle contamination. Ceramic rings (e.g., TEL SR-C300) require nitrogen purge compatibility; verify system gas specs before purchase.
What to Check Before Buying a Used Shadow Ring in 2026
- Edge wear: Measure with a digital micrometer; reject if wear exceeds 0.2mm (PVD tools require <0.15mm for uniformity).
- Flatness: Use a 0.001” resolution dial gauge; deviation >5µm invalidates CVD compatibility.
- Coating integrity: Inspect via UV fluorescence (e.g., Keyence VK-X200) for cracks in diamond-like carbon (DLC) layers.
- Material verification: Confirm tungsten carbide via XRF spectrometer; reject steel-alloy substitutes.
- Lifecycle data: Units >5 years old must have <10,000 process cycles logged (check via OEM PM history). Rings exceeding these thresholds risk deposition defects and costly downtime.
FAQ
Q: Are used shadow rings as reliable as new ones?
A: Yes, if refurbished to OEM specs (recoated edges, flatness <5µm). New parts carry a 2-year warranty; used parts rely on seller inspection reports.
Q: Will a Lam P5 shadow ring fit an AMAT Endura?
A: No. Lam and AMAT use incompatible mounting hole patterns; cross-brand installs require custom adapters.
Q: How to clean a used shadow ring?
A: Use isopropyl alcohol and ultrasonic bath (30kHz,
Recent Market Listings
Updated Sep 30No recent market activity for Used Shadow Ring for Semiconductor Equipment.
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