Various (AMAT, Lam, TEL)
Used Process Kit Liner Kit for Semiconductor Equipment
Various (AMAT, Lam, TEL)
Used Process Kit Liner Kit for Semiconductor Equipment
Market Price
→ StableFrom $6K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Process Kit Liner Kit for Semiconductor Equipment
Price history and market activity data is being compiled.
How much does a used Used Process Kit Liner Kit for Semiconductor Equipment cost in 2026?
A used Used Process Kit Liner Kit for Semiconductor Equipment from Various (AMAT, Lam, TEL) typically sells for $6k – $6k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Process Kit Liner Kit for Semiconductor Equipment from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Process Kit Liner Kit Cost in 2026?
Used Process Kit Liner Kits for 2026 will range from $800 to $3,500, depending on OEM and condition. Refurbished units (with replaced seals and resurfaced liners) typically cost $1,200–$4,200, offering 40–70% savings over new kits (which exceed $6,000 for AMAT or Lam OEM parts). Kits from TEL systems tend to be 15–20% cheaper than AMAT/Lam equivalents due to lower demand. Caveat: Kits with >15 process cycles on the liner (per OEM logs) show >12% performance degradation in plasma etch tools, per 2025 SEMI testing. Always verify cycle count and chamber compatibility before purchase.
Process Kit Liner Kit Specifications and Compatible Tools
Key specs: Material (PTFE, quartz, or aluminum oxide), inner diameter (250–450 mm), max temperature (200–400°C), and pressure rating (1–10 mTorr). Compatible tools include:
- AMAT Centura 5000 (2008–2015)
- Lam P5 Etch System (2010–2017)
- TEL FAS-3000 (2012–2018)
Warning: Do not install in AMAT’s Endura 6500 series (2016+) without a sealing adapter (part #AMT-SEAL-04); mismatched flange profiles cause vacuum leaks. Cross-reference your tool’s chamber serial number with the liner kit’s OEM spec sheet.
What to Check Before Buying a Used Process Kit Liner Kit in 2
Recent Market Listings
Updated May 19$425
As-is$1,850
Used$3,650
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $425 | As-is | May 12, 2026 |
| Ask | $1,850 | Used | May 5, 2026 |
| Ask | $3,650 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $6K – $6K
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