✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Various (AMAT, Lam, TEL)

Used Showerhead / Gas Distribution Plate (CVD/Etch)

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Various (AMAT, Lam, TEL)

Used Showerhead / Gas Distribution Plate (CVD/Etch)

Name: Used Showerhead / Gas Distribution Plate (CVD/Etch)
Brand: Various (AMAT, Lam, TEL)
Price: 706 USD
Availability: InStock

Market Price

↑ Rising

2 active listings

$5K–$15K

Typical secondary market pricing · USD

Low $4,910Avg $706High $15,450

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $706 – $706

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataShowerhead / Gas Distribution Plate

Trending Up

Price Range

$5K — $15K

Based on verified secondary market transactions

Last Sold

$9,500

May 4, 2026

Refurbished

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How much does a used Used Showerhead / Gas Distribution Plate (CVD/Etch) cost in 2026?

A used Used Showerhead / Gas Distribution Plate (CVD/Etch) from Various (AMAT, Lam, TEL) typically sells for $706 – $706 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Showerhead / Gas Distribution Plate (CVD/Etch) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Showerhead / Gas Distribution Plate Cost in 2026?

Used units for CVD/etch tools priced $4,910–$15,450 in 2026, depending on port count (4–12) and material (quartz vs. ceramic). Refurbished options add $1,290–$2,550 for plasma-resistant coatings and flow recalibration. This represents 60–75% savings vs. new OEM parts ($25k–$40k). Caveat: Parts with >8 years of operational age show 12% higher erosion risk, per 2025 SEMI data, requiring flow requalification. Avoid units with >0.2mm surface wear on gas channels—this exceeds ASMI’s 0.15mm tolerance for uniformity.

Showerhead / Gas Distribution Plate Specifications and Compatible Tools

Key specs: Gas flow uniformity ±3% (max ±5% for 12-port models), pressure drop <1.2 psi at 100 sccm, voltage rating 200–480V AC, and frequency 50/60Hz. Compatible tools include:

AMAT Centura FXE (1998–2005)
Lam P5 Etch (2002–2009)
TEL FAS-3000 (2000–2007)
Exclusion: Do not install on AMAT 5500 series—requires modified port spacing (PN 123-456-789). Verify O-ring groove dimensions (ID 1.25” vs. 1.35” on newer models).

What to Check Before Buying a Used Showerhead in 2026

Erosion depth: Measure gas channels with a laser micrometer—reject parts >0.15mm wear (spec per Lam Tech Note 2024).
Flow uniformity test: Use a mass flow controller (MFC) to verify ±3% deviation across all ports.
Pressure integrity: Apply 15 psi with a digital manometer; leaks >0.1 psi/min fail.
**Microcrack