Used Showerhead / Gas Distribution Plate (CVD/Etch)

Name: Used Showerhead / Gas Distribution Plate (CVD/Etch)
Brand: Various (AMAT, Lam, TEL)

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Showerhead / Gas Distribution Plate (CVD/Etch) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Showerhead / Gas Distribution Plate (CVD/Etch) cost in 2026?

Pricing for used Used Showerhead / Gas Distribution Plate (CVD/Etch) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Showerhead / Gas Distribution Plate (CVD/Etch) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Showerhead / Gas Distribution Plate Specifications and Compatible Tools

Key specs: Gas flow uniformity ±3% (max ±5% for 12-port models), pressure drop <1.2 psi at 100 sccm, voltage rating 200–480V AC, and frequency 50/60Hz. Compatible tools include:

AMAT Centura FXE (1998–2005)
Lam P5 Etch (2002–2009)
TEL FAS-3000 (2000–2007)
Exclusion: Do not install on AMAT 5500 series—requires modified port spacing (PN 123-456-789). Verify O-ring groove dimensions (ID 1.25” vs. 1.35” on newer models).

What to Check Before Buying a Used Showerhead in 2026

Erosion depth: Measure gas channels with a laser micrometer—reject parts >0.15mm wear (spec per Lam Tech Note 2024).
Flow uniformity test: Use a mass flow controller (MFC) to verify ±3% deviation across all ports.
Pressure integrity: Apply 15 psi with a digital manometer; leaks >0.1 psi/min fail.
**Microcrack