Various (AMAT, Lam, TEL)
Used Lower Electrode for Semiconductor Etch Chamber
Various (AMAT, Lam, TEL)
Used Lower Electrode for Semiconductor Etch Chamber
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Lower Electrode for Semiconductor Etch Chamber moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Lower Electrode for Semiconductor Etch Chamber cost in 2026?
Pricing for used Used Lower Electrode for Semiconductor Etch Chamber units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Lower Electrode for Semiconductor Etch Chamber from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Lower Electrode Specifications and Compatible Tools
Key specs: RF power handling up to 5 kW, voltage rating 200–500 V RF, thermal conductivity 18–22 W/m·K, and frequency 13.56 MHz. Compatible tools include:
- AMAT Centura (model 5500, 1998–2005)
- Lam P5 (model 4520, 2002–2010)
- TEL FAS-3000 (model F3K-LE, 2000–2008)
Exclusion: Not compatible with AMAT Reflexion N25 (part # 890-34567) due to differing RF coupling designs. Verify bonding layer material (aluminum vs. copper) for thermal match. Electrodes with ceramic insulators rated <1,500 V RMS must be derated for high-power etch processes.
What to Check Before Buying a Used Lower Electrode in 2026
- Surface erosion: Measure with a 3D profilometer; reject if erosion exceeds 15% of original thickness.
- RF impedance: Test with a vector network analyzer (VNA) at 13.56 MHz; mismatch >50 Ω requires retuning.
- Thermal conductivity: Use a laser flash analyzer; values <18 W/m·K indicate degraded bonding layers.
- Bonding layer integrity: X-ray inspection for voids >0.5 mm² in copper-aluminum joints.
- Usage history: Request prior cycle count; avoid parts with >5,000 hours at >4 kW.
Parts from tools decommissioned pre-2015 may lack modern insulation coatings, increasing arcing risk. Always verify OEM service bulletins for revised tolerance standards.
FAQ
Q: Used vs. refurbished lower electrode—what’s the difference?
A: Used parts are resold as-is; refurbished units include replaced RF shields, bonding layers, and insulation coatings. Refurbished parts carry
Recent Market Listings
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