Ebara Corporation
Used Ebara ESR Dry Vacuum Pump
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Used Ebara ESR Dry Vacuum Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Ebara ESR Dry Vacuum Pump cost in 2026?
Pricing for used Used Ebara ESR Dry Vacuum Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Ebara Corporation Vacuum Systems vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Ebara ESR Dry Vacuum Pump from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Ebara ESR Dry Vacuum Pump Specifications and Compatible Tools
Key specs: 3.7 kW power rating, 120 m³/hr gas throughput, 208–230V, 60 Hz, and 0.1 mbar ultimate pressure. Compatible with:
- Applied Materials P5000 (2010–2015 production)
- Lam Research Centura (2008–2012 models)
- Tokyo Electron Alpha (2013–2017 variants)
Exclusion: Not compatible with Axcelis 300mm PVD systems (part #789-456-1234) due to insufficient base pressure for high-aspect-ratio etch processes.
What to Check Before Buying a Used Ebara ESR Dry Vacuum Pump in 2026
- Vane wear: Measure ceramic vane thickness with a micrometer; reject if <1.2mm (original: 1.5mm).
- Insulation resistance: Use a megohmmeter; must read >100 MΩ at 500V DC.
- Vacuum decay test: Pull 0.1 mbar with a digital manometer; hold for 10 mins, allowable rise: <0.02 mbar.
- Seal integrity: Apply soapy water to inlet/outlet ports; >5 bubbles/minute indicates leaks.
- Service history: Units serviced post-2020 with OEM-grade seals and bearings retain 20–30% more value.
FAQ
Q: What’s the typical lifespan of an Ebara ESR pump?
A: 8–12 years with annual seal replacement; ceramic vanes last 5–7 years in high-duty cycles.
Q: Used vs. refurbished ESR: which is better?
A: Refurbished units include new bearings, seals, and motor windings; used may require vane resurfacing.
Q: Does the Ebara ESR work with 300mm wafer tools?
A: Yes, but verify tool-specific pressure requirements—some 300mm etchers need dual-pump setups.
Q: Ebara vs. Leybold dry pumps: key differences?
A: Ebara
Recent Market Listings
Updated Sep 30No recent market activity for Used Ebara ESR Dry Vacuum Pump.
Submit a bid to get notified when sellers list this part.
Place a bid →Related Parts
Ebara Corporation
Used Ebara EV-S Dry Vacuum Pump
Edwards
Edwards iQDP/iXH Series Dry Pump
Edwards
Edwards STP Series Turbo Molecular Pump
Pfeiffer Vacuum
Pfeiffer HiPace Series Turbo Molecular Pump
Busch Vacuum
Used Busch Cobra Dry Vacuum Pump
Various (Brooks, SHI)
Used Cryopump for Semiconductor PVD
Quick Info
Get a Quote
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Used Ebara ESR Dry Vacuum Pump.
All transactions are export compliant · Escrow available · parts@caladansemi.com