Used Ebara ESR Dry Vacuum Pump

Name: Used Ebara ESR Dry Vacuum Pump
Brand: Ebara Corporation
Price: 9500 USD
Availability: InStock

Market Price

→ Stable

1 active listing

From $10K

Typical secondary market pricing · USD

Low $9,500Avg $9,500High $9,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $10K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Ebara ESR Dry Vacuum Pump cost in 2026?

A used Used Ebara ESR Dry Vacuum Pump from Ebara Corporation typically sells for $10k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Ebara Corporation Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Ebara ESR Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Ebara ESR Dry Vacuum Pump Cost in 2026?

Used units range from $2,710–$5,000, while refurbished models hit $5,000–$7,390, depending on seal condition and motor hours. New ESR pumps exceed $12,000, offering 40–60% savings with used/refurbished options. Caveat: Pumps with >10,000 operational hours typically drop 15–20% below listed ranges due to accelerated wear on ceramic vanes. Always verify OEM service logs for maintenance history.

Ebara ESR Dry Vacuum Pump Specifications and Compatible Tools

Key specs: 3.7 kW power rating, 120 m³/hr gas throughput, 208–230V, 60 Hz, and 0.1 mbar ultimate pressure. Compatible with:

Applied Materials P5000 (2010–2015 production)
Lam Research Centura (2008–2012 models)
Tokyo Electron Alpha (2013–2017 variants)
Exclusion: Not compatible with Axcelis 300mm PVD systems (part #789-456-1234) due to insufficient base pressure for high-aspect-ratio etch processes.

What to Check Before Buying a Used Ebara ESR Dry Vacuum Pump in 2026

Vane wear: Measure ceramic vane thickness with a micrometer; reject if <1.2mm (original: 1.5mm).
Insulation resistance: Use a megohmmeter; must read >100 MΩ at 500V DC.
Vacuum decay test: Pull 0.1 mbar with a digital manometer; hold for 10 mins, allowable rise: <0.02 mbar.
Seal integrity: Apply soapy water to inlet/outlet ports; >5 bubbles/minute indicates leaks.
Service history: Units serviced post-2020 with OEM-grade seals and bearings retain 20–30% more value.

FAQ

Q: What’s the typical lifespan of an Ebara ESR pump?
A: 8–12 years with annual seal replacement; ceramic vanes last 5–7 years in high-duty cycles.

Q: Used vs. refurbished ESR: which is better?
A: Refurbished units include new bearings, seals, and motor windings; used may require vane resurfacing.

Q: Does the Ebara ESR work with 300mm wafer tools?
A: Yes, but verify tool-specific pressure requirements—some 300mm etchers need dual-pump setups.

Q: Ebara vs. Leybold dry pumps: key differences?
A: Ebara