Used Ebara EV-S Dry Vacuum Pump

Name: Used Ebara EV-S Dry Vacuum Pump
Brand: Ebara Corporation
Price: 9500 USD
Availability: InStock

Market Price

→ Stable

1 active listing

From $10K

Typical secondary market pricing · USD

Low $9,500Avg $9,500High $9,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $10K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Ebara EV-S Dry Vacuum Pump

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Used Ebara EV-S Dry Vacuum Pump cost in 2026?

A used Used Ebara EV-S Dry Vacuum Pump from Ebara Corporation typically sells for $10k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Ebara Corporation Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Ebara EV-S Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Ebara EV-S Dry Vacuum Pump Cost in 2026?

Used Ebara EV-S dry vacuum pumps (EV-S-250/315 models) range from $2,710–$7,390 in 2026, depending on scroll wear and service history. Refurbished units with <2,000 operating hours and full OEM seal kits cost $5,120–$7,390, while used units with >5,000 hours drop to $2,710–$3,980. This represents 45–70% savings vs new EV-S pumps priced at $12,000–$14,000. Critical caveat: Units with >8,000 cumulative operating hours show >15% degradation in ultimate vacuum (<0.01 mbar) and require scroll replacement. Always verify maintenance logs for oil-free seal replacements (Ebara recommends every 6,000–8,000 hours).

Ebara EV-S Dry Vacuum Pump Specifications and Compatible Tools

Key specs: 1.5–3.7 kW power, 150–315 l/min flow rate, 208/230V AC, 50/60 Hz. Ultimate vacuum: 0.01–0.1 mbar (Hg). Scroll design eliminates oil contamination, critical for CVD and etch tools. Compatible with:

Lam Research Centura P5000 (2008–2015)
Applied Materials Endura CVD (2010–2017)
Tokyo Electron HARP-300 (2012–2019)
Exclusion warning: Not compatible with Axcelis 3200 Implanter (part #AX-VP-032) due to conflicting 480V requirement. Verify tool’s vacuum interface dimensions (EV-S uses ISO-KF30 flanges) before installation.

What to Check Before Buying a Used Ebara EV-S Dry Vacuum Pump in 2026

Scroll wear measurement: Use a digital caliper to check scroll plate thickness. Reject units with <1.2mm erosion (new spec: 1.8–2.0mm).
Vacuum decay test: Connect to a digital manometer and measure pull-down time to 0.1 mbar. Must achieve <3 minutes (spec for EV-S-315).
Electrical insulation resistance: Use a megohmmeter to test motor windings. Minimum 100 MΩ at 500V DC (failure = rotor damage risk).
Lubrication system: Confirm dry-running bearings show <0.05mm axial play (use dial indicator). Excess play indicates end-of-life.
Service history: Units >10 years old require scroll replacement regardless of hours. Cross-check OEM service tag dates with maintenance records.

FAQ

Q: Can Ebara EV-S handle reactive gases like ClF₃?
A: No. EV-S is for non-corrosive processes only. Use EV-R series for reactive gas compatibility.

Q: Used vs refurbished EV-S: which is better?
A: