Used Kashiyama / Ulvac Dry Vacuum Pump

Name: Used Kashiyama / Ulvac Dry Vacuum Pump
Brand: Kashiyama (Ulvac)

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Kashiyama / Ulvac Dry Vacuum Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Kashiyama / Ulvac Dry Vacuum Pump cost in 2026?

Pricing for used Used Kashiyama / Ulvac Dry Vacuum Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Kashiyama (Ulvac) Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Kashiyama / Ulvac Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Kashiyama / Ulvac Dry Vacuum Pump Specifications and Compatible Tools

Key specs: Ultimate pressure 1×10⁻³ Torr, pumping speed 50–500 l/s, power 1.5–5 kW, voltage 200–480V AC, frequency 50/60 Hz. Compatible tools:

Applied Materials Centura Cluster Tool (1998–2005)
Lam Research TCP 9400 (2001–2010)
ASMI Fusion D1000 PECVD (2003–2012)
Exclusion: Not compatible with Axcelis 300mm Ion Implanters (Part #IM-300X-2007) due to conflicting vacuum level thresholds. Verify inlet port thread type (NPT vs ISO) before installation.

What to Check Before Buying a Used Kashiyama / Ulvac Dry Vacuum Pump in 2026

Rotor wear: Measure clearance with micrometer; >0.05mm indicates failure risk.
Vacuum integrity: Test with mercury manometer; must reach <1×10⁻² Torr in 10 minutes.
O-ring condition: Reject units with cracks >2mm or perished seals (use UV light for stress checks).
Motor insulation resistance: Use megohmmeter; <100MΩ requires rewinding.
Service history: Units >15 years old need bearing replacement (lifecycle