Used Kashiyama / Ulvac Dry Vacuum Pump

Name: Used Kashiyama / Ulvac Dry Vacuum Pump
Brand: Kashiyama (Ulvac)
Price: 5750 USD
Availability: InStock

Market Price

→ Stable

$2K–$10K

Typical secondary market pricing · USD

Low $1,500Avg $5,750High $10,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Kashiyama / Ulvac Dry Vacuum Pump

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How much does a used Used Kashiyama / Ulvac Dry Vacuum Pump cost in 2026?

A used Used Kashiyama / Ulvac Dry Vacuum Pump from Kashiyama (Ulvac) typically sells for $2k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Kashiyama (Ulvac) Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Kashiyama / Ulvac Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Kashiyama / Ulvac Dry Vacuum Pump Cost in 2026?

2026 price range: $8,000–$25,000 (used), $12,000–$30,000 (refurbished). Savings vs new: 84–92% (new models average $120k+ in 2026). Caveat: Units with >10,000 operational hours often require rotor replacement ($3k–$5k), impacting total value. Market demand for 300mm node compatibility drives higher pricing for pre-2015 models with ISO 3882-1 flanges.

Kashiyama / Ulvac Dry Vacuum Pump Specifications and Compatible Tools

Key specs: Ultimate pressure 1×10⁻³ Torr, pumping speed 50–500 l/s, power 1.5–5 kW, voltage 200–480V AC, frequency 50/60 Hz. Compatible tools:

Applied Materials Centura Cluster Tool (1998–2005)
Lam Research TCP 9400 (2001–2010)
ASMI Fusion D1000 PECVD (2003–2012)
Exclusion: Not compatible with Axcelis 300mm Ion Implanters (Part #IM-300X-2007) due to conflicting vacuum level thresholds. Verify inlet port thread type (NPT vs ISO) before installation.

What to Check Before Buying a Used Kashiyama / Ulvac Dry Vacuum Pump in 2026

Rotor wear: Measure clearance with micrometer; >0.05mm indicates failure risk.
Vacuum integrity: Test with mercury manometer; must reach <1×10⁻² Torr in 10 minutes.
O-ring condition: Reject units with cracks >2mm or perished seals (use UV light for stress checks).
Motor insulation resistance: Use megohmmeter; <100MΩ requires rewinding.
Service history: Units >15 years old need bearing replacement (lifecycle