Used MKS 1179A Mass Flow Controller

Name: Used MKS 1179A Mass Flow Controller
Brand: MKS Instruments
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used MKS 1179A Mass Flow Controller

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Used MKS 1179A Mass Flow Controller cost in 2026?

A used Used MKS 1179A Mass Flow Controller from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS 1179A Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used MKS 1179A Mass Flow Controller Cost in 2026?

Used units range from $632–$1,200, while refurbished models with recalibration and firmware updates cost $1,500–$3,320. New OEM units from MKS typically exceed $10,000, offering 67–94% savings depending on condition. Refurbished parts include NIST-traceable calibration certificates valid for 2 years. Caveat: Controllers with factory calibration tags older than 5 years require recertification, adding $250–$400 to the total.

MKS 1179A Specifications and Compatible Tools

Key specs: 0–100 sccm flow range, ±1% accuracy, 12–36V DC power, 4–20 mA output, and 5–50 Hz response. Compatible with:

Applied Materials Centura 5500 (1998–2005)
Lam Research Endura P5i (2000–2007)
Tokyo Electron HCP-4000 (2002–2010)
Exclusion: Not compatible with Axcelis S Series tools using part number 1179A-002 due to firmware mismatch. Verify PID loop settings before installation.

What to Check Before Buying a Used MKS 1179A in 2026

Calibration date: Reject units with tags older than 3 years; recertification costs $350.
Body inspection: Use a 10x loupe to check for sensor chamber cracks (reject if >0.1 mm).
Voltage stability: Measure with a Fluke 434 II; output must stay within ±5% of rated voltage under load.
PID firmware: Confirm version v3.2 or newer using a HART communicator; older versions lack drift compensation.
O-ring condition: Replace if surface hardness exceeds 90 Shore A (test with durometer).