Used MKS 627 Baratron Capacitance Manometer

MKS 627 Specifications and Compatible Tools

The MKS 627 operates across 1×10⁻⁵ to 1,000 Torr, with ±0.5% accuracy at 1–100 Torr (±1% below 1×10⁻³ Torr). It requires 24V DC and outputs 4–20mA or 0–5V signals. Compatible tools include:

• Applied Materials Centura (1998–2005)
• Lam Research Endura P5i (2000–2008)
• SEMI E3 vacuum chambers (2002–2010)
  Warning: Do not install on Veeco Nexus 300 systems (1999–2004) without a signal conditioner (part #VC-300-SC); the 0–5V output conflicts with the host’s 4–20mA requirement.

What to Check Before Buying a Used MKS 627 Baratron Capacitance Manometer in 2026

1. Calibration date: Reject units calibrated before 2021; drift exceeds ±1.5% beyond 5-year lifecycle.
2. Diaphragm integrity: Use a multimeter to measure baseline resistance (should read >10MΩ). <5MΩ indicates contamination.
3. Signal stability: Connect to a DAQ system; apply 100 Torr and log output for 10 minutes. Deviation >±2% invalidates accuracy.
4. Physical damage: Inspect the ceramic body for hairline cracks (use a 10x loupe); even minor fractures cause vacuum leaks.
5. Firmware version: Units with firmware pre-v3.2 (2015) lack modern compensation algorithms, reducing usable range by 40%.

FAQ

Q: Is a used MKS 627 better than a refurbished one?
A: Refurbished units include recalibration, replaced seals, and updated firmware.